2023年全國碩士研究生考試考研英語一試題真題(含答案詳解+作文范文)_第1頁
已閱讀1頁,還剩16頁未讀, 繼續(xù)免費閱讀

下載本文檔

版權說明:本文檔由用戶提供并上傳,收益歸屬內(nèi)容提供方,若內(nèi)容存在侵權,請進行舉報或認領

文檔簡介

1、作者:Chad R. Snyder, Member Frederick I. Mopsik國籍:America出處:IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENTA Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion–Part III: Conducting and

2、 Semiconducting MaterialsAbstract—This paper describes the construction, calibration, and use of a precision capacitance-based metrology for the measurement of the thermal and hygrothermal (swelling) expansion of thin fi

3、lms. It is demonstrated that with this version of our capacitance cell, materials ranging in electrical properties from insulators to conductors can be measured. The results of our measurements on p-type -oriented single

4、 crystal silicon are compared to the recommended standard reference values from the literature and are shown to be in excellent agreement.Index Terms—Capacitance cell, coefficient of thermal expansion (CTE), guarded elec

5、trode, high sensitivity displacement, inner layer dielectrics, polymers, thin films.I. INTRODUCTIONTHE coefficient of thermal expansion (CTE) is a key design parameter in many applications. It is used for estimating dime

6、nsional tolerances and thermal stress mismatches. The latter is of great importance to the electronics industry, where thermal stresses can lead to device failure. For accurate modeling of these systems, reliable values

7、are needed for the CTE.Traditionally, displacement gauge techniques such as thermomechanical analysis (TMA) have been utilized for determining the CTE. However, standard test methods based on these techniques are limited

8、 to dimensions greater than 100 m [1-2]. This is m ?problematic for materials which can be formed only as thin layers (such as coatings and certain inner layer dielectrics). Additionally, there is some question as to w

9、hether values on-oriented single crystal sapphire ( ) and a 14-thick inner layer 3 2O Al m ?dielectric material [10]. It was recognized in II that the data reduction was simple as long as the air filling the gap between

10、 the capacitor plates was dry. However, to expand the utility of the capacitance cell to hygrothermal expansion (i.e., swelling in a humid environment), the third paper (III) described the data reduction techniques neces

11、sary for use of the capacitance cell under humid conditions .Fig. 1. Schematic of the electrodes. Note that the shaded areas correspond to the nichrome coating.The resolution of the instrument was determined in II and II

12、I. For dry, isothermal conditions, the capacitance cell can measure relative changes in thickness on the order of , for a 0.5-mm thick sample; this corresponds to a resolution on the order of 7 10?. Under dry conditions

13、in which the temperature is changed, the m 11 10 5 ? ?reproducibility of a relative thickness change (e.g., for CTE measurement) is on the order of . Finally, under humid conditions, the ultimate resolution is primarily

溫馨提示

  • 1. 本站所有資源如無特殊說明,都需要本地電腦安裝OFFICE2007和PDF閱讀器。圖紙軟件為CAD,CAXA,PROE,UG,SolidWorks等.壓縮文件請下載最新的WinRAR軟件解壓。
  • 2. 本站的文檔不包含任何第三方提供的附件圖紙等,如果需要附件,請聯(lián)系上傳者。文件的所有權益歸上傳用戶所有。
  • 3. 本站RAR壓縮包中若帶圖紙,網(wǎng)頁內(nèi)容里面會有圖紙預覽,若沒有圖紙預覽就沒有圖紙。
  • 4. 未經(jīng)權益所有人同意不得將文件中的內(nèi)容挪作商業(yè)或盈利用途。
  • 5. 眾賞文庫僅提供信息存儲空間,僅對用戶上傳內(nèi)容的表現(xiàn)方式做保護處理,對用戶上傳分享的文檔內(nèi)容本身不做任何修改或編輯,并不能對任何下載內(nèi)容負責。
  • 6. 下載文件中如有侵權或不適當內(nèi)容,請與我們聯(lián)系,我們立即糾正。
  • 7. 本站不保證下載資源的準確性、安全性和完整性, 同時也不承擔用戶因使用這些下載資源對自己和他人造成任何形式的傷害或損失。

評論

0/150

提交評論