用于氣體檢測(cè)的MEMS電容式紅外光強(qiáng)探測(cè)器的設(shè)計(jì)與制備技術(shù)研究.pdf

1、中國(guó)科學(xué)技術(shù)大學(xué)碩士學(xué)位論文用于氣體檢測(cè)的MEMS電容式紅外光強(qiáng)探測(cè)器的設(shè)計(jì)與制備技術(shù)研究姓名：楊地委申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：檢測(cè)技術(shù)與自動(dòng)化裝置指導(dǎo)教師：張正勇20110506AbstractIAbstractThegasanalysisisnotonlyusedinthetraditionalindustrylikeminesafetychemicalprocesscontrolpublicsafetypollutionmoniti

2、ngagriculturalfacilitiesetcbutalsoinhealthcareeveninbiologicalsciencemicroelectronicsnewmaterialsnewtechnologymeme.Weintroduceseveralgasdetectingmethodswhichareputintopracticalapplicationcurrentlytheirrespectiveadvantage

3、sdisadvantagesthencomeupwithgreatsignificanceofinfraredgasdetectingmethodsSummarizingthepredecesssresearchachievementsthispaperproposesakindofMEMScapacitiveinfrareddetectbasedoninfraredabsptionofgasfgasdetecting.Theparal

4、lelplatecapacitwithadoublecapacitancestructurecaneffectivelyrestrainstheeffectoftemperatureotherenvironmentalfactsonthestabilityoftheinfrareddetect.Afterconfirmingthebasicstructurethepapergivesdetailedintroductiononitspr

5、eparationmaterial.GettingtheheatdistributiononcavitywallthethermalstressdistributiononelasticthinfilmthroughANSYSsimulationcombiningwiththeprocessrealizingwedeterminethebetterstructuresizeofthecavitythicknessoftheElastic

6、filmplatespacingoftheparallelplatecapacit.MEMSprocesstechnologyisakeyfactfmicrosystems’implementationinthispaperwemakeacomprehensiveresearchontheprocessinvolvedinthepreparationofinfrareddetectthencombinevariousprocesstec

7、hnologytoachieveoptimalexpecteddetectionindex.Wethehalfbridgedetectingcircuitwithanoperationalamplifiertowardthedetect’stinycapacitanceoutput.Thiscanensurereferencecapaciteffectivelyrestrainoutsideinterferencefacts’effec

8、tontheoutputsignalalsochangethenonlinearrelationshipbetweenthecapacitancewithplatespacingintoapproximatelinearrelationshipbetweenvoltageoutputinfraredlightintensity.Accdingtotheeticalderivationresultswewkouttheacteristic