多弧與磁控技術制備TiN薄膜在壓縮機工件中的應用研究.pdf

1、東北大學碩士學位論文多弧與磁控技術制備TiN薄膜在壓縮機工件中的應用研究姓名：張健申請學位級別：碩士專業(yè)：流體機械及工程指導教師：巴德純20070201東北大學碩士學位論文abstractAbstractInthiswork，TiNcoatingsweresuccessfullydepositedontobentaxleandvaneofcompressorbythemulti—arcionplatingtechniqueandmagn

2、etrontechniqueThistechnologyinplaceofsprayingPandMo，increasedbentaxleandvaneusinglengthoflire，reducedcostTiNcoatingsweredepositedontobentaxlebymulti—arcionplatingtechniqueusingShenYangYLVacuumcompanyequipmentBentaxlesurf

3、acehardnesswasintensifiedwhenmakinglargeexperimentsandresearchingcraft，forexamplebiasvoltage、airpressure、arccurrentTiNcoatingweredepositedontovanebymultiarcionplatingtechniqueandmagnetrontechniqueusingNEUfluidexperimentl

4、abWorkingfeatureofAC、RF、DCWasresearchedandcraftWasresearchedforexampletargetdistance、airpressure、proportionofworkingair、temperatureFinallyTi／TiNcoatingsweredepositedontovanethatcouldincreasebindingforceandhavehighhardnes

5、sDuringtheresearch，opticalmicroscopeWasusedtoobservethesurface；XRDWaSusedtoanalysisstructures；roughness、hardnessandthicknessweremeasuredtoo1000hwearingexperimentwasfulfilledbySYcompanyequipmentFromtheresult，TiNcoatingsha

6、dgoodsurfacecapabilityandmechanicalcapabilityRefrigeratingoutputandenergyeffectivenesswerereduced；，powerwasincreasedBecausetherehadsomequestioninuniformi哆androughnessButvibration、yawpandrevolutionhadgoodeffectIngeneral。v

7、aneandbentaxle’sworkingenvironmentwassatisfied；wearingcapabilitywasintensified；usinglifeWasimprovedFurthermore，eachcharacteristicofmulti—arcandmagnetrontechniquewasanalyzed，thatcarriedthroughcontrast，forexamplesurfaceima