高性能cmos一氧化碳?xì)怏w傳感器的優(yōu)化設(shè)計

1、上海交通大學(xué)碩士學(xué)位論文高性能CMOS一氧化碳?xì)怏w傳感器的優(yōu)化設(shè)計姓名：彭本賢申請學(xué)位級別：碩士專業(yè)：軟件工程指導(dǎo)教師：程秀蘭20080215– 5 – THE OPTIMUM DESIGN OF HIGH PERFORMANCE CMOS CO SENSOR ABSTRACT The ultimate goal of wireless sensor networks (WSN) is to develop ultra-low-pow

2、er and miniature devices that can be widely distributed in remotely area. The monolithic integration of sensors ensures mass manufacturing with low-cost. Our primary goal is to design a gas sensor integration with readou

3、t circuit on same chip which can be easily implemented with post-CMOS process steps and satisfy the demand of WSN. The selectivity, stability, power, noise and compatibility with CMOS process issues are presented in this

4、 thesis. A unique phenomenon that the surface temperature of platinum film oscillates when it is exposed to carbon monoxide can be facilitated to enhance the selectivity significantly, which can identify carbon monoxide

5、exclusively among the gas mixture. However, it can’t quantify the gases up to now. An approach is proposed to establish the relationship between the oscillation period and CO concentration based on non-linear system theo

6、ry. The theoretic simulation results agree with the experiment results. The main challenge for gas sensor is the design of a micro-hotplate structure providing stable and uniform temperature to ensure a high sensitivity

7、and selectivity to gases. Finite difference algorithm is developed to solve the problem of sensor temperature stability under ambient temperature interference. The simulation results are verified by PDEtool and ANSYS. It