基于MEMS的微型振動(dòng)式發(fā)電機(jī)系統(tǒng)的研究.pdf

1、重慶大學(xué)碩士學(xué)位論文基于MEMS的微型振動(dòng)式發(fā)電機(jī)系統(tǒng)的研究姓名：劉雪花申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：儀器科學(xué)與技術(shù)指導(dǎo)教師：溫志渝20060501重慶大學(xué)碩士學(xué)位論文英文摘要IIABSTRACTWiththecontinuousdevelopmentofMEMStechnologymicropowerhasbecomeoneofthemainbottleneckswhichcumberthepracticalapplicationcostd

2、ecreasingautomationofMEMSsystem.TheresearchofmicropowerisanimptantpartofMEMStechnologyhasbecomeahotspotalloverthewld.Theauthhasoverviewedthecontemparyresearchsituationofmicropowerthroughoutthewldespeciallyanalyzedcompare

3、dtheprinciplesofthesemicrogenerats.Accdingtosomesituationwheremicropowercan’tberegedreplacedespeciallytosomespecialrequirementofmicropowerinimplanteddevicesdistributedsystemswirelesscommunicationstrafficmicroweaponaviati

4、ontodevelopamicrogeneratsystemmicroenergyconversiondevicewhichcanbeusedwithoutthelimitationoftimehasbeenanimptantresearchprogramwhichhasadeepacademicmeaninganurgentneedfulbackground.Supptedbythenational“863”projectweputf

5、wardanovelmicrovibratypowergeneratsystemwhosemainstructureconsistsoftwopiecesofelectrettwocombedfingerscapacitsbasedonmicroelectronicsMEMStechnologysoon.Afterdesignanalysissimulationofthemicrogeneratmodeasampleismadeitso

6、utputpowercanreach12.5μW.Itwillmeettherequirementofmanyvibrationcircumstancessuchasautomationcontrolembeddedmedicaldevicewirelesssenssystemmicrorobot.Itisanimptantresearchintheattempttorealizetheintegrationofmicropowermi

7、crosensmicroactuatlowpowerconsumptioncircuit.Wecanpredictitsscientificimptanceitswidepotentialapplications.Thispaperfocusedonthefollowingaspects:1.Basedonscrutinizinganalyzingexistingdocumentsthecurrentdevelopmentinthear

8、eaofmicropowerisanalyzedespeciallythosevibratyoneselectretbasedones.2.Therelevanttheiesofmicroelectretbasedvibratygeneratarestudied.3.AccdingtotheoutputacteristicsoftheMEMSmicrogeneratanenergystagecircuitcomposedofresona