磁懸浮式微動工作臺的設計與建模研究.pdf

1、Yf；55392專魏靜趲碩士學位論文MASTERTHESIS論文題目：磕惠疆燃盔塑蘭Ⅱ罡i≥!童立遂虹遑攘勁亟學科專業(yè)：壘K‘生越絮查!疊蔓一作者姓名：留j《≯指導教師：娶每、，奪一永孝荽技完成口期：——蘭竺i：!j——浙江理工大學碩士學位論文DesignandModelingofaMagneticLevitationMicromotionStageAbstractInprecisionengineeringfieldsuchaspre

2、cisionmachinerymicro—electronicengineeringandnanotechnologyprecisionmicromotionisrequiredSomicro—motionstage、vithllighperformanceisaemeialinstrumentinthisfieldInthisthesis，currentmicromotionstagesaresummarizedandtheirtra

3、velrange，positioningaccuracyanddegreesoffreedomarecompared，anovelmicro—motionmethodwhichcarlrealizemagneticlevitationmicromotionactuatedbyACwindingandDCelectromagnetisproposed，thenanewmagneticlevitationmicro—motionstagei

4、sdesignedwhichmovingplatecanrealizemicro—motionwithwiderangesixdegreesoffreedomandkeepingconstantheightThisthesispresentsthedesignofmainstructureofthemagneticlevitationmicromotionstage，Halbachpermanentmagnetarraystatorwi

5、nding，electromagnet，movingplateanddrivingcircuitThemagneticfieldsinducedbytheHalbachpermanentmagnetarrayandstatorwindingsareanalyzed，themagneticfieldsynthesizedbytheabovetwoisgivenInaddition，usingMaxwellstresstensoLthere

6、lationshipbetweendrivingforceandwindingcurrentandtherelationshipbetweenDCcurrentsanddrivingforcecausedbyelectromagnetaredemonstratedFinallythedynamicmotionmodelofthemagneticlevitationmicromotionstageisconstructedThecontr

7、ollersoflead—lagsandPIDusedinthelateralmotioncontrolofthemovingplatearedesignedoutofconsiderationthatthemagneticlevitationmicro—motionstageshowsthecharacteristicofinstabilityunderopenloopBothofthemaresimulatedinMatlab，re

8、spectivelyTheresultsofsimulationshowsthattheperformanceofPIDcontrollerissuperiortothatoftheotheroneTherefore，itissuggestedthatPIDcontrollerismoresuitabletothismagneticlevitationmicro。motionstageFinallyexperimentsincludin