多晶硅鑄錠爐操作維護(hù)說(shuō)明書(shū)修改版最終版

1、1多晶硅鑄錠爐操作維護(hù)手冊(cè)操作維護(hù)手冊(cè)無(wú)錫開(kāi)日能源科技股份有限公司無(wú)錫開(kāi)日能源科技股份有限公司2011年3月3目錄1安全................................................................................................................................................................

2、.....51.1安全符號(hào)及說(shuō)明.........................................................................................................................................51.2安全保護(hù)措施.........................................................

3、...................................................................................52設(shè)備規(guī)格...................................................................................................................................

4、..........................82.1設(shè)備的平面圖............................................................................................................................................92.2設(shè)備接口規(guī)格要求................................

5、..................................................................................................113設(shè)備概述...................................................................................................................

6、........................................113.1操作原理.................................................................................................................................................113.2系統(tǒng)構(gòu)成.................

7、................................................................................................................................124.操作界面....................................................................................

8、.......................................................................144.1報(bào)警頁(yè).............................................................................................................................................

9、........144.2主視圖.....................................................................................................................................................214.3曲線(xiàn)趨勢(shì)圖.............................................

10、................................................................................................244.4歷史數(shù)據(jù)庫(kù)查詢(xún)................................................................................................................

11、......................284.5模式頁(yè).....................................................................................................................................................304.6主參數(shù)和系統(tǒng)配置頁(yè)...........................

12、...................................................................................................304.6.1主參數(shù)頁(yè)1.............................................................................................................

13、............................314.6.2主參數(shù)頁(yè)2..........................................................................................................................................314.6.3主參數(shù)頁(yè)3—水溫報(bào)警及加熱報(bào)警參數(shù)設(shè)置................

14、...................................................................324.6.4系統(tǒng)配置窗口......................................................................................................................................324.6.

15、5主參數(shù)溫度壓力PID分區(qū)參數(shù)配置表............................................................................................334.6.7慢抽程序參數(shù)設(shè)置窗口.............................................................................................

16、.........................334.7手動(dòng)操作..................................................................................................................................................344.7.1熱偶倉(cāng)檢漏............................

17、.............................................................................................................354.8手動(dòng)維護(hù)屏幕....................................................................................................

18、......................................364.9運(yùn)行干預(yù)操作.........................................................................................................................................384.10初始檢查窗口屏幕....................

19、............................................................................................................414.11配方屏幕......................................................................................................

20、.........................................444.12隔熱層手動(dòng)升降屏幕............................................................................................................................454.13主加熱參數(shù)屏幕...........................

21、..........................................................................................................474.14手動(dòng)下腔室升降窗口...................................................................................................

22、.........................475.爐子的具體操作...............................................................................................................................................485.1概述..................................

23、.......................................................................................................................485.2打開(kāi)下腔室...........................................................................................

24、..................................................495.3取出長(zhǎng)晶結(jié)束后的硅錠........................................................................................................................515.4進(jìn)料過(guò)程..........................

25、.....................................................................................................................525.5選擇運(yùn)行的配方及下載........................................................................................

26、................................535.6自動(dòng)運(yùn)行初始檢查屏..............................................................................................................................545.7自動(dòng)循環(huán)過(guò)程.....................................

27、....................................................................................................546.設(shè)備維護(hù)................................................................................................................