飛秒激光微納加工系統及功能器件工藝研究.pdf

1、中國締孽敬求大李博士學位論文圈幽論文題目王型邀當叢納壟墨疊垂叢生堂墨壁———————蘭—上L—塹—』∑—————作者姓名郭銳學科專業(yè)精密儀器與札械導師姓名黃文浩教授徐先凡救授完成時間二oo八年十JlABSTRACTAsanewtypeoflaserbasedtechnologyfemtosecondlasertwo—photonmicrofabricationhasitsuniquetechnologicaladvantages，lik

2、etruethreedimensionalfabricationabilitysubmicronresolutionandlowheateffecteta1ItbecomesmoreimportantinmicrofabricationtechnologyresearchfieldInthisthesis，supportedbythekeyprojectof“Functionaldevicesmicrofabricationtechno

3、logyviafemtosecondlaser”(No50335050)fromNSFC，thefemtosecondlasermicrofabricationsystemismodifiedandthemechanismoftwophotonpolymerizationinducedbyfemtosecondlaserisstudiedThefabricationparametersareoptimizedthroughthemeth

4、odofcombinationofthetheoryandexperimentresearchAswell，severalfunctionalmicrodevicesaredesigned，fabricatedandmeasuredThemainresearchcontentsarelisted嬲following：1Anintroductionofthehomemadefemtosecondlasermicrofabrications

5、ystemisgivenSomemodificationworkaredonelike400nmfabricationopticalroute，lagerscanningrangestageaswellasthecontrollingsoftware2AfurtherstudyoffemtosecondlasertwophotonmicrofabricationtechniquesisgivenBasedonfreeradicalthe

6、oryoftwophotonpolymerization，thefabricationresolutionaswellasthefabricatedlineandsurfacearestudiedtheoreticallyandexperimentallyConstructedtheMAXandMINmodeltoreconstructthepredesigneddeviceandcontrolthefabricationroughne

7、ssandprecisionDuringtheprocessofthreedimensionalcomplexdevices，thedilationanderosionalgorithmofmathematicalmorphologyareintroducedtoimprovetheprecisionThevariablescanningdistanceaccordingtothedifferentslopeofthedevicespr

8、ofiletoincreasethefabricationprecisionandefficiency3Severalfunctionalmicrodevicesarcdesigned，fabricatedandmeasuredAnewresin，S3，isusedtofabricatehighqualitythreedimensional(3D)log。pilephotoniccrystalwithgoodperformanceint