微波等離子體的靜電探針測試系統(tǒng)的研究設計.pdf

1、分類號密級UDC注l學位論文微波等離子體的靜電探針測試系統(tǒng)的研究設計(題名和副題名)張寶芳(作者姓名)指導教師姓名劉華電子科技大學高工成都(職務、職稱、學位、單位名稱及地址)稀觸學位繃碩士銼鋤測試計量技術及儀器論文提交日期2008.4論文答辯日期2008.5學位授予單位和日期電子科技大學答辯委員會主席評閱人2008年年月，畢日注1:注明《國際十進分類法UDC》的類號。ABSTRACTABSTRACTReeently，themierowa

2、vePlasmateehniquehasattractedmoreandmoreattentionsoftheresearehers.IthasmoreexeellentmeritsamongallPlas們nas，fexamPleithashighdegreeofionization，highelectrondensity，widePressureseoPenoeleetrodePollulion.50themicrowavePlas

3、matechnology15widelyusedinCVD(Chemieal物pDePosition)，etchingtechnology，ionizationsourceotherfields.Thelevelof即plicationeffeetisdirectlyrelatedtothePar別rersinthePlasma，suehasdensity，energyalloeationandaverageoftheelectrons

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