全內反射光開關列陣與多模光干涉器的集成化研究.pdf

1、浙江大學博士學位論文全內反射光開關列陣與多模光干涉器的集成化研究姓名：尹銳申請學位級別：博士專業(yè)：微電子與固體電子學指導教師：王明華2001.5.2摘要ABSTRACTTheintegrationofphotonicdevicebecomesmoreandmoreimportantduetothefastdevelopingopticalnetworkInthisdissertation，westudytheintegrationpro

2、pertiesoftwoimportantphotonicdevices：opticalswitcharrayfthekeycomponentofopticalnetwork)andmultimodeinterference(MMI)coupler(itcanrealizemanyfunctionsinopticalsignalprocessing)Onepurposeofthisstudyistoenhancetheintegrati

3、onabilityofopticalswitcharray，whichcanberealizedbyincreasingtheextinctionratiooftheswitchunitandoptimizethearraystructureTheotherpurposeistoimprovethecompatibilitybetweenMMIcouplerandmostwaveguidedevicesThiscanberealized

4、byadoptingnewinterferencestructureCurrent—injectiontotal—internal—reflectionfTIRlisappliedtotheswitchduetoitsnon—polarizationdependentandhigh—speedpropertyConsideringbandfilling，bandgapshrinkageandfree—carrierabsorption，

5、thecarrier—inducedindexchangeofGaAsisanalyzedbetween08um～161amTheasymmetricalY—branchisoptimizedandtheextinctionratioisincreasedmorethan10dBⅥ，ebringforwardperpendicularopticalswitchwhichhasstrongintegrgtfionpotentialThed

6、istancebetweenadjacentwaveguidecallbeassmallas2509mTheextinctionratioof25dBandcrosstalkof45dBisobtainedinsucha4x4arrayConventionalMM【couplerisnormallyfabricatedondeeplyetchedhigh—index—contrastwaveguidestructure，whilemos

7、totherwaveguidedevicesareweak—confinedorgradual—bulge—edgestructuresSothestudyonMMIcoupleristhecombinationofMMIandweak—confinedwaveguideorMMIcouplerandgradual—bulge—edgewaveguideThepropagation—constant—error1udgementmeth

8、odisbroughtoutforthefirsttimetoanalyzethosemodesintheMMIregionResultsshowthatselfimagingcanbeimprovedbytheintroducingofweak—confinedorgradualbulge—edgeWaveguideThismeanswiththeenhancedcompatibilityofMMIcouplertheperforma

9、ncecanbeimprovedatthesalTletime1Furtherstudyshowsthatweak—confinedMMIcouplerreachthebestperformanceundercertainindexcontrastAnequationtosolvethisoptimalindexcontrastisgainedbydecreasethepropagationconstanterrorsofhigh—or