一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設計及其結(jié)構(gòu)分析.pdf

1、湖南大學碩士學位論文一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設計及其結(jié)構(gòu)分析姓名：伍立棟申請學位級別：碩士專業(yè)：機械制造及其自動化指導教師：周志雄20050320一種新型高回轉(zhuǎn)精度微主軸系統(tǒng)的整體設計及其結(jié)構(gòu)分析AbstractInthisdissertationthehighrotaryaccuracybearingsusedinspindlesystemofsuperprecisionmachinesinexistencearementi

2、onedalsothedisadvantagesofthesebearingsusedfthemicrofabricationareanalyzed.basedontheanalysisofthetheyofflexturehingeanewmicrospindlesystemusedfthemicrofabricationisdesignedwhichincludedthewktheywholestructureofthemicros

3、pindlethentheprojecttriedtoapplyFiniteElementMethod(FEM)totheanalysisdesignofthestructureofthemicrospindle.Thebearingofthemicrospindleuseswholestructuralflexturehingetoensurethespindle’shighrotaryaccuracy.Firstthewholest

4、ructureofthemicrospindlesystemwasanalyzeddesignedthenWiththeFEMsoftwareANSYSthefiniteelementmodelofbearingwasbuiltaccdingtoitsstructuralacterwkconditionsthenstaticanalysiswasappliedtoit.Staticanalysisdeterminedthestresse

5、sdisplacementsinthebearingunderallstoftypicalwkconditions.Theresultofthestaticanalysisrevealedthatthestressofthebearingwaslowertothematerial’sallowablestressalsotheXYZtotaltravelofthecentrepointwasverysmalluptotherequire

6、mentsofthedesign.Asanimptantqualityindexthedynamicspecialtydeterminesthesecurityefficiency.Intheprojectthevibrationacteristics(naturalfrequenciesmodeshapes)ofthestructurewasdeterminedbyapplyingmodalanalysis.Italsocanbeas

7、tartingpointfanotheredetaileddynamicanalysissuchasatransientdynamicanalysisaharmonicresponseanalysisaspectrumanalysis.Thisprojectprovidedvaluableexplationconsultantfthefuturedesignofthemicromachineusedftheelectrochemical