壓電微位移驅動器的結構設計與仿真.pdf

1、電子科技大學碩士學位論文壓電微位移驅動器的結構設計與仿真姓名：黃志奇申請學位級別：碩士專業(yè)：機械電子工程指導教師：杜平安20040301Thepiezoelectricmicrodisplacementactuatorhaswidelyappliedprospectinmanyareas，suchasprecisionorientation，micromanipulation，andSOonComparedwithotherkindso

2、factuatoLithasmanyadvantages，forinstance，tinybulk，unlimitedresolution，rapidresponse，noheat，lowpowerconsumption，nomagneticfieldsSotheresearchofpiezoelectricmicro—displacementactuatorhasgotmuchattentionindomesticandabroadM

3、akingakindofpiezoelectricmicro—displacementactuatorwhichhaslargemotiondistanceandhighresolutionisthegoalofthisdiscourse111eresearchcornentsofthisdiscoursemainlyincludethefollowingsixaspects：l、Tllisdiscoursediscussedandst

4、udiedtheperformanceofmechanicsandelectricityaboutpiezoelectriccrystalTheprincipleaboutpiezoelectricactuatorisexpatiatedbasingonthestudyofpiezoelectriceffect；2、Theelectromechanicalcouplingfiniteelementformulationofpiezoel

5、ectricelementiSdeducedinthisdiscourseonbasisoffiniteelementtheoriesandpiezoelectriceffect；3、Simulationanalysisforthephysicalparameterofpiezoelectricdrivingelementundervariouselectricfieldsandboundaryconditionsisconducted

6、withANSYS，itincludesthedistortionandtheoutputforceofelement，andSOon；4、Basingonanalysingthestructureofpiezoelectricactuator，thestructureofbionicandsteppingpiezoelectricmicro—displacementactuatorwhichcanmeetthetechnicalreq

7、uestisdesigned；5、Simulationanalysisforactuatorisconductedandthestructureofactuatorisoptimized；6、BasingonsimulationanalysingpiezoelectricactuatorapiezoelectricactuatorismadeTheexperimentaboutthisactuatorhasbeendoneTherati

8、onalityofdesignandsimulationanalysisisverifiedonbasisofoncomparingtheresultsofexperimentandresultsofanalysis111eresultsofexperimentandresultsofanalysisindicatethestructurewhichthisdiscoursedesignedCanmeettherequestoflarg

9、emotiondistanceandhighresolutionSomeusefuldatumandconclusionsareobtainedThesedatumandconclusionswouldbehelpfultotheresearchinthefutureKeywords：piezoelectricmicrodisplacementactuator；piezoelectriceffect；simulationanalysis