電弧離子鍍深管內(nèi)壁硬膜沉積研究.pdf

1、大連理工大學(xué)碩士學(xué)位論文電弧離子鍍深管內(nèi)壁硬膜沉積研究姓名：王文濤申請學(xué)位級別：碩士專業(yè)：材料加工工程指導(dǎo)教師：林國強20090601大連理工大學(xué)碩士學(xué)位論文StudyonDepositionofhard—filmsontheinternalwallofdeeptubesbyarcionplatingAbstractHardcoatingtechnologyhasreceivedmoreintentionsincethelongevit

2、yofthecurertoolscoatedwithTiNfilmsWaSsuccessfullyimprovedin1970s‰ughthedevelopmentofthelastseveraldecades，thehardoutersurfaceofthemembranetechnologyhasmaderemarkableprogress，greatlypromotethedevelopmentoftheindustrialaut

3、omation，agoodeconomicbenefitHowever。inpracticetoworkwithintheworkpiecesurfaceisnotlessthantheoutsidesurfaceoftheworkpieeefacesuch2usthecylinderengine，pipelinetransport，ionacceleratorcontrol，artillerytubeThesepartsoftenwa

4、llWearcorrosionandotherformsofdestruction，depositedinpipewallcorrosionresistance，abrasionresistance；Hi曲TemperatureinthefilmisofgreatsignificanceButrarelyseenindomesticandforeignpublicationsrelatedtechnicalreports，Therefo

5、rewallcoatingtechnologydevelopmentiSaveryurgenttaskOurworkgrouphavedonealotofworkontheresearchingoffilmsdepositionontheinternalwallofdeeptubesbyAIP(arcionplating)Inthisstudy，TiNfilmdepositiononinnerwallofthetubes(①502005

6、mmbartube，①503005mmopentube)WaScarriedout、杭t11AIPInordertoincreasethedepthofthefilminthedeeptube，wewillUSethehightemperaturepermanent—magnettocontroltheplasmatogointothetubeThenfilmthickness。XImSEM，hardnesserewerecarried

7、out‘111eresultsoffilmshardnessshowthatwhetherintheopentubeorinthebartubethesample’Snanohardnessisabove20GPaatanydepthAccordingtothestandardofHKhardnesslargerthan20GPathemicrohardnessshowsthat，theratioofdepthanddiameterco

8、uldbe20bythefilmsdepositionon也eintemalwallofdeeptubestechnologyAccordingtothefilmthicknessmeaSured，thedepositionrateCanbecalculated：itiS0450an／hat150mmdepthinthebartubebut10841am／hintheopentubeXRDresultsshowthatthefilmiS

9、pureTiNAndthepreferringorientationchangesfrom(111)to(220)whiletheincreaseofthetubedepthAttheendofthethesisthebestmethodoffilmsdepositiononinternalwallofdeeptube，WaSappliedonhardfilmdepositionontheintemalwallofthemoldfors

10、kinningAndfilmcoatedmold’Sservice1ireiSmuchlongerThemethodalSOwasappliedonthefilmofCrNdepositiononthePEMFC’SbipolarplateItmakestheintemalwallofthetrenchesinthebipolarplatealsocoatwithcompactanduniformfilmTheelectricalcon