模具鋼上a-C：H（N）膜的制備及表征.pdf

1、筍jQj㈨NORT。HEAS。TER：碩士學(xué)位論文THESISFORMASTER’SDEGREE論文題目模具銅上a—cH(N)膜的制備及表征作者張；十學(xué)院機(jī)械工程與自動化學(xué)臃專業(yè)流體機(jī)械及X程指導(dǎo)教師巴德純教授備注年月日東北大學(xué)碩士學(xué)位論文ThePreparationandCharacterizationofaC：H(N)FilmsDepositedonDIESteelAbs仃actInthisarticlewesuccessfully

2、synthesizeddiamondlikecarbonfilmsdoped啪nitrogen(aC：H(N))OntheCrl2steelappliedchromium(C0metalintermediatelayersusingCH4，12asSOUICegasesandargonasdiluentgasbyradiofrequencyplasmaenhancedchemicalvapordepositioncrfPECVD)pro

3、cess11lepropertiesandperfomaneesofthefilmwasalsostudiedinvariousN2partialpressuresrn“films’compositionandmierostruetureweredetectedbyRamanspectroscopyXrayphotoelectronspectroscopy(xPs)，X—raydi3hactionspectroscopy(XRD)ere

4、；皿emechanicalandfrictionpropertieswcTetestedbytheindentometerandpin011disctesterFromthetests，wefoundtherelationshipoftherigidityandfrictionproperties。loN2partialpressuresTheresultshowsthattheaC：H(N)丘lmCanbedepositedonCrl

5、2steelbyRFplasmaDuetotheinterstressbetweenfilmsandsubstrates，theadhesionofDLCfilmonsubstrateshasaproblemFilms黜crackedandpeeledoffeasilyfromthesubstratesTosolvetheproblem，Crmetalintermediatelayersarepreparedbyionbeamsputt

6、eringtechniquebeforeaC：H(N)flimdepositedbyrfPECVDTheresultsindicatethatadhesionandthewearabilityofaC：HCN)filma托significantlyincreasedⅪ①indicatethatthefilmsisamorphousandwhentheothercondifi∞iSimmovabilitytheN2partialpress

7、ureseffectsfilms’structureandfilms’ck啦lctefgreatlyWiththeN2pamalpressures’increase，theNcontentinfiLrnsaugments，andN—spjCbondproportionrise，SO咿densityincreasesTocomparewith也eDLCis’tdopednilTogen也ehardness、elasticmodulusan

8、dthewearabilityofaC：H(N)flimsalesignificantlyincreasedCoefficientoffrictionisimprovedbyCrmetalintermediatelayersonCrl2steelAtthesallletimetheCoefficientoffrictionofDLCwhichisd叩ednitrogenislowerthantheDLCis’tdopednitrogen