版權(quán)說(shuō)明:本文檔由用戶(hù)提供并上傳,收益歸屬內(nèi)容提供方,若內(nèi)容存在侵權(quán),請(qǐng)進(jìn)行舉報(bào)或認(rèn)領(lǐng)
文檔簡(jiǎn)介
1、華中科技大學(xué)碩士學(xué)位論文用于介電泳操縱的C-MEMS電極設(shè)計(jì)與制備技術(shù)研究姓名:龔杰申請(qǐng)學(xué)位級(jí)別:碩士專(zhuān)業(yè):機(jī)械電子工程指導(dǎo)教師:湯自榮;史鐵林20090520華 中 科 技 大 學(xué) 碩 士 學(xué) 位 論 文 華 中 科 技 大 學(xué) 碩 士 學(xué) 位 論 文 Abstract Dielectrophoresis(DEP) method was widely used in separation, transportation, trappi
2、ng or sorting of micro/nano particles in the fluids, the key for realizing the dielectrophoretic manipulation was to design and fabricate micro-electrode array for producing the required distribution of the electric fiel
3、d. Up to present, the electrode for dielectrophoretic manipulation was almost planar inert metal electrode fabricated by conventional bulk micromachining, which had some shortcomings, including complex fabrication proces
4、s, high cost, not flexible design, low efficiency and throughput manipulation and so on. The paper presented novel C-MEMS electrode could be used for dielectrophoretic manipulation, optimum design of the structure of el
5、ectrode was carried out based-on the numerical simulation of electric field, the fabrication process of C-MEMS electrode was improved using micromechanical interlocking. The main research contents of this thesis includes
6、 three aspects: The basic principle of DEP was explained, the induced effective dipole moment of typical micro-particle was solved using equivalent dipole model, such as dielectric spherical, ellipsoidal particles and sh
7、ell model for biological particles. Then calculation expression of DEP force was established in AC(alternate current) electric field. The space distribution of electric field and its gradient was obtained by the finite e
8、lement method, which was produced by C-MEMS electrode, it further analyzed the influence of the structure of electrode on their distribution. According to curve fitting, we summarized the relationship between DEP force o
9、f particles and various parameters of square column quadrupole electrodes. The DEP force is proportional to the square of the voltage applied on the electrode, inversely the cublic of the width of electrode and the quart
10、ic of the space-width ratio. As the height of electrode increasing, the effective DEP force was extended. Micromechanical interlocking was introduced to previous C-MEMS process solving inadequate adhesion of substrate.
11、The paper theoretically discussed the mechanism of micromechanical interlocking improving adhesion, the structure achieving micromechanical interlocking was designed which was similar to “ink-pot”, adhesion improvements
12、was qualitatively estimated by immersion experiment in heated 40% potassium hydroxide (KOH) solution. The experimental results was consistent with theory, their both demonstrated the method could effectively improve adhe
溫馨提示
- 1. 本站所有資源如無(wú)特殊說(shuō)明,都需要本地電腦安裝OFFICE2007和PDF閱讀器。圖紙軟件為CAD,CAXA,PROE,UG,SolidWorks等.壓縮文件請(qǐng)下載最新的WinRAR軟件解壓。
- 2. 本站的文檔不包含任何第三方提供的附件圖紙等,如果需要附件,請(qǐng)聯(lián)系上傳者。文件的所有權(quán)益歸上傳用戶(hù)所有。
- 3. 本站RAR壓縮包中若帶圖紙,網(wǎng)頁(yè)內(nèi)容里面會(huì)有圖紙預(yù)覽,若沒(méi)有圖紙預(yù)覽就沒(méi)有圖紙。
- 4. 未經(jīng)權(quán)益所有人同意不得將文件中的內(nèi)容挪作商業(yè)或盈利用途。
- 5. 眾賞文庫(kù)僅提供信息存儲(chǔ)空間,僅對(duì)用戶(hù)上傳內(nèi)容的表現(xiàn)方式做保護(hù)處理,對(duì)用戶(hù)上傳分享的文檔內(nèi)容本身不做任何修改或編輯,并不能對(duì)任何下載內(nèi)容負(fù)責(zé)。
- 6. 下載文件中如有侵權(quán)或不適當(dāng)內(nèi)容,請(qǐng)與我們聯(lián)系,我們立即糾正。
- 7. 本站不保證下載資源的準(zhǔn)確性、安全性和完整性, 同時(shí)也不承擔(dān)用戶(hù)因使用這些下載資源對(duì)自己和他人造成任何形式的傷害或損失。
最新文檔
- 生物芯片碳微電極的C-MEMS制備工藝研究.pdf
- C-MEMS工藝制備碳微結(jié)構(gòu)實(shí)驗(yàn)研究.pdf
- 基于光誘導(dǎo)介電泳的細(xì)胞操縱技術(shù)研究.pdf
- 介電泳精確操縱與批量組裝納米線的關(guān)鍵技術(shù)研究.pdf
- 基于C-MEMS的微納結(jié)構(gòu)的制備及其超級(jí)電容特性的研究.pdf
- 可拉伸介電電泳技術(shù)及其用于生物微粒操控技術(shù)研究.pdf
- 基于光誘導(dǎo)介電泳力的微粒操縱研究.pdf
- 介電泳和介電潤(rùn)濕技術(shù)裝置的設(shè)計(jì)與應(yīng)用.pdf
- 應(yīng)用于MEMS的中厚PZT鐵電薄膜制備技術(shù)研究.pdf
- 基于C-MEMS工藝的微結(jié)構(gòu)間碳懸浮結(jié)構(gòu)制造與測(cè)試.pdf
- 用于氣體檢測(cè)的MEMS電容式紅外光強(qiáng)探測(cè)器的設(shè)計(jì)與制備技術(shù)研究.pdf
- 基于PCB工藝的交流介電電泳芯片粒子富集與分離技術(shù)研究.pdf
- 微膠囊電泳彩色顯示結(jié)構(gòu)與制備技術(shù)研究.pdf
- 基于光誘導(dǎo)介電泳的生物粒子微操縱機(jī)理與平臺(tái)實(shí)現(xiàn)方法研究.pdf
- 基于MEMS技術(shù)的硅微神經(jīng)電極陣列的設(shè)計(jì)與制造.pdf
- 介電電泳芯片的設(shè)計(jì)與實(shí)現(xiàn).pdf
- MEMS慣性測(cè)量單元設(shè)計(jì)與相關(guān)技術(shù)研究.pdf
- 共平面DGS結(jié)構(gòu)用于MEMS可重構(gòu)濾波技術(shù)研究.pdf
- 光誘導(dǎo)介電泳芯片的磁控濺射制備與表征.pdf
- 用于透皮給藥的MEMS金屬微針技術(shù)研究.pdf
評(píng)論
0/150
提交評(píng)論