傳感器新技術(shù)的發(fā)展外文翻譯

1、<p>　　Development of Sensor New Technology</p><p>　　Sensor is one kind component which can transform the physical quantity, chemistry quantity and the biomass into electrical signal. The output signal h

2、as the different forms like the voltage, the electric current, the frequency, the pulse and so on, which can satisfy the signal transmission, processing, recording, and demonstration and control demands. So it is the aut

3、omatic detection system and in the automatic control industry .If automatic Technology is used wider, then sensor is more importan</p><p>　　Several key words of the sensor：</p><p>　　1 Sensor Ele

4、ments</p><p>　　Although there are exception ,most sensor consist of a sensing element and a conversion or control element. For example, diaphragms,bellows,strain tubes and rings, bourdon tubes, and cantileve

5、rs are sensing elements which respond to changes in pressure or force and convert these physical quantities into a displacement. This displacement may then be used to change an electrical parameter such as voltage, resis

6、tance, capacitance, or inductance. Such combination of mechanical and electrical element</p><p>　　2 Sensor Sensitivity</p><p>　　The relationship between the measured and the sensor output signal

7、 is usually obtained by calibration tests and is referred to as the sensor sensitivity K1= output-signal increment / measured increment . In practice, the sensor sensitivity is usually known, and, by measuring the output

8、 signal, the input quantity is determined from input= output-signal increment / K1.</p><p>　　3 Characteristics of an Ideal Sensor</p><p>　　The high sensor should exhibit the following characteri

9、stics.</p><p>　　(a)high fidelity-the sensor output waveform shape be a faithful reproduction of the measured; there should be minimum distortion.</p><p>　　(b)There should be minimum interference

10、 with the quantity being measured; the presence of the sensor should not alter the measured in any way.</p><p>　　(c)Size. The sensor must be capable of being placed exactly where it is needed.</p><

11、;p>　　(d)There should be a linear relationship between the measured and the sensor signal.</p><p>　　(e)The sensor should have minimum sensitivity to external effects, pressure sensor,for example,are often

12、subjected to external effects such vibration and temperature.</p><p>　　(f)The natural frequency of the sensor should be well separated from the frequency and harmonics of the measurand.</p><p>　

13、　Sensors can be divided into the following categories：</p><p>　　1 Electrical Sensor</p><p>　　Electrical sensor exhibit many of the ideal characteristics. In addition they offer high sensitivity

14、as well as promoting the possible of remote indication or mesdurement.</p><p>　　Electrical sensor can be divided into two distinct groups:</p><p>　　(a)variable-control-parameter types,which incl

15、ude:</p><p>　　(i)resistance</p><p>　　(ii)capacitance</p><p>　　(iii)inductance</p><p>　　(iv)mutual-inductance types</p><p>　　These sensor all rely on extern

16、al excitation voltage for their operation.</p><p>　　(b)self-generating types,which include</p><p>　　(i)electromagnetic</p><p>　　(ii)thermoelectric</p><p>　　(iii)photoem

17、issive</p><p>　　(iv)piezo-electric types</p><p>　　These all themselves produce an output voltage in response to the measurand input and their effects are reversible. For example, a piezo-electri

18、c sensor normally produces an output voltage in response to the deformation of a crystalline material; however, if an alternating voltage is applied across the material, the sensor exhibits the reversible effect by defor

19、ming or vibrating at the frequency of the alternating voltage.</p><p>　　2 Resistance Sensor</p><p>　　Resistance sensor may be divided into two groups, as follows:</p><p>　　(i)Those

20、which experience a large resistance change, measured by using potential-divider methods. Potentiometers are in this group.</p><p>　　(ii)Those which experience a small resistance change, measured by bridge-ci

21、rcuit methods. Examples of this group include strain gauges and resistance thermometers.</p><p>　　3 Capacitive Sensor</p><p>　　The capacitance can thus made to vary by changing either the relati

22、ve permittivity, the effective area, or the distance separating the plates. The characteristic curves indicate that variations of area and relative permittivity give a linear relationship only over a small range of spaci

23、ngs. Thus the sensitivity is high for small values of d.  Unlike the potentionmeter, the variable-distance capacitive sensor has an infinite resolution making it most suitable for measuring small increments of

24、dis</p><p>　　4 Inductive Sensor</p><p>　　The inductance can thus be made to vary by changing the reluctance of the inductive circuit.</p><p>　　Measuring techniques used with capacit

25、ive and inductive sensor:</p><p>　　(a)A.C. excited bridges using differential capacitors inductors.</p><p>　　(b)A.C. potentiometer circuits for dynamic measurements.</p><p>　　(c)D.C

26、. circuits to give a voltage proportional to velocity for a capacitor.</p><p>　　(d)Frequency-modulation methods, where the change of C or L varies the frequency of an oscillation circuit.</p><p>

27、;　　Important features of capacitive and inductive sensor are as follows:</p><p>　　(i)resolution infinite</p><p>　　(ii)accuracy±0.1% of full scale is quoted</p><p>　　(iii)displa

28、cement ranges 25*10-6 m to 10-3m</p><p>　　(iv)rise time less than 50us possible</p><p>　　Typical measurands are displacement, pressure, vibration, sound, and liquid level.</p><p>　　

29、5 Linear Variable-differential Ttransformer</p><p>　　6 Piezo-electric Sensor</p><p>　　7 Electromagnetic Sensor</p><p>　　8 Thermoelectric Sensor</p><p>　　9 Photoelectric

30、 Cells</p><p>　　10 Mechanical Sensor and Sensing Elements</p><p>　　In information age, the information industry includes information gathering, transmission, process three parts, namely sensor t

31、echnology, communication, computer technology. Because of ultra large scale integrated circuit’s rapid development after having been developed Modern computer technology and communication, not only requests sensor precis

32、ion reliability, speed of response and gain information content request more and more high but also requests its cost to be inexpensive. The obvious trad</p><p>　　Using the physical phenomenon, the chemical

33、reaction, the biological effect as the sensor principle therefore the researches which discovered the new phenomenon and the new effect are the sensor technological improving ways .it is important studies to developed ne

34、w sensor’s the foundation. Japanese Sharp Corporation uses the superconductivity technology to develop successfully the high temperature superconductivity magnetic sensor and get the sensor technology significant breakth

35、rough. Its sensi</p><p>　　Using the immune body and the antigen meets one another compound when the electrode surface. It can cause the electrode potential change and use this phenomenon to be possible to ge

36、nerate the immunity sensor. The immunity sensor makes with this kind of immune body may to some organism in whether has this kind of ant original work inspection. Like may inspect somebody with the hepatitis virus immune

37、 body whether contracts the hepatitis, plays to is fast, the accurate role. The US UC sixth branch </p><p>　　The sensor material is the important foundation for sensor technology, because the materials scien

38、ce is progressive and the people may make each kind of new sensor For example making the temperature sensor with the high polymer thin film; The optical fiber can make the pressure, the current capacity, the temperature,

39、 the displacement and so on the many kinds of sensors; Making the pressure transmitter with the ceramics. The high polymer can become the proportion adsorption and the release hydrog</p><p>　　Measured the we

40、t scope is wide; The temperature range is wide, may reach -400 ℃ ~ +1,500 ℃; The speed of response is quick, is smaller than 1S; The size is small, may use in the small space measuring wet; The temperature coefficient is

41、 small.</p><p>　　The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy fi

42、lm electronic technology, its technical performance is stable, the year drifting quantity is smaller than 0.1%F.S, warm floats is smaller than ±0.15%/10K, anti- overloads strongly, may reach the measuring range seve

43、ral hundred times. The survey scope may from 0 to 60mpa.German E+H Corporation and the American</p><p>　　The optical fiber application is send the material significant breakthrough, its uses in most early th

44、e optical communication techniques. In the optical communication use discovered works as environmental condition change and so on the temperature, pres-sure, electric field, magnetic field, causes the fiber optic transmi

45、ssion light wave intensity, the phase, the frequency, change and so on the polarization condition, the survey light wave quantity change, may know causes these light wave physica</p><p>　　In semiconductor te

46、chnology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all intr

47、oduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensiti

48、ve, the wet sensitive sensor, the use spu</p><p>　　The Japanese horizontal river company uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing; the system helps

49、 the silicon resonance type pressure transmitter. The core partially presses two resonant Liang by the feeling which above the silicon diaphragm and the silicon diaphragm manufactures to form, two resonant Liang's fr

50、equency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate </p><p>　　American Silicon Microstructure Inc.(SMI) the company develops a seri

51、es of low ends, linear in 0.1% to 0.In 65% scope silicon micro pressure transmitter, the lowest full measuring range is 0.15psi (1KPa), it makes take the silicon as the material, has the unique three dimensional structur

52、e, the light slight machine-finishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses th</p>

53、;<p>　　Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1

54、%. In aspect and so on industry control, aerospace domain, biomedicine has the vital role, like on the airplane the use may reduce the airplane weight, reduces the energy. Another characteristic is can be sensitive is sm

55、all surveyed, may make the blood pressure pressure transmitter.</p><p>　　The Chinese aviation main corporation Beijing observation and control technical research institute, the development CYJ series splashe

56、s thanks the membrane pressure transmitter is uses the ion sputtering craft to process the metal strain gauge, it has over come the nonmetallic strain gauge easily the temperature influence insufficiency, has the high st

57、ability, is suitable in each kind of situation, is measured the medium scope widely, but also overcame the tradition lowly to glue the precision w</p><p>　　Integrates the sensor the superiority is the tradit

58、ional sensor is unable to achieve, it is a simple sensor not merely, it in at the same time the auxiliary circuit part and send the part will integrate on together the chip, will cause it to have the calibration, to comp

59、ensate, from the diagnosis and the network correspondence function, it might reduce the cost, the gain in yield, this kind of blood pressure sensor which American LUCAS, NOVASENSOR Corporation will develop, each week wil

60、l be able</p><p>　　The intellectualized sensor is one kind of belt microprocessor sensor, is achievement which the microcomputer and the sensor unifies, it has at the same time the examination, the judgment

61、and the information processing function, compares with the traditional sensor has very many characteristics:</p><p>　　Has the judgment and the information processing function, can carry on the revision, the

62、error to the observed value compensates, thus enhancement measuring accuracy; May realize the multi-sensor multi parameters survey; Has from the diagnosis and from the calibration function, enhances the reliability; The

63、survey data may deposit and withdraw, easy to operate; Has the data communication interface, can and the microcomputer direct communication.</p><p>　　The sensor, the signal adjustment electric circuit, the m

64、onolithic integrated circuit integration forms ultra large-scale integrated on a chip the senior intelligence sensor. American HONY WELL Corporation ST-3000 intelligence sensor, the chip size only then has 3×4×

65、2mm3, uses the semiconductor craft, makes CPU, EPROM, the static pressure, the differential pressure, the temperature on the identical chip and so on three kind of sensitive units.</p><p>　　The intellectuali

66、zed sensor research and the development, US is at the leading position. American Space Agency when development spaceship called this kind of sensor for the clever sensor (Smart Sensor), on the spaceship this kind of sens

67、or is extremely important. Our country in this aspect research and development also very backward mainly is because our country semiconductor integrated circuit technological level is limited.</p><p>　　The s

68、ensor’s development is changing day after day since especially the 80's humanities have entered into the high industrialization the information age, sensor techno-logy to renewal, higher technological development. US

69、, Japan and so on developed country sensor technological development quickest, our country because the foundation is weak, the sensor technology compares with these developed countries has the big disparity. Therefore, w

70、e should enlarge to the sensor engineering research, the de</p><p>　　——From《Sensor Technology Handbook》,Jon Wilson,Newnes</p><p><b>　　傳感器新技術(shù)的發(fā)展</b></p><p>　　傳感器是一種能將物理量、

71、化學(xué)量、生物量等轉(zhuǎn)換成電信號(hào)的器件。輸出信號(hào)有不同形式，如電壓、電流、頻率、脈沖等，能滿(mǎn)足信息傳輸、處理、記錄、顯示、控制要求，是自動(dòng)檢測(cè)系統(tǒng)和自動(dòng)控制系統(tǒng)中不可缺少的元件。如果把計(jì)算機(jī)比作大腦，那么傳感器則相當(dāng)于五官，傳感器能正確感受被測(cè)量并轉(zhuǎn)換成相應(yīng)輸出量，對(duì)系統(tǒng)的質(zhì)量起決定性作用。自動(dòng)化程度越高，系統(tǒng)對(duì)傳感器要求越高。</p><p>　　傳感器的幾個(gè)關(guān)鍵詞：</p><p><

72、;b>　　1傳感器元件</b></p><p>　　除特例外，大多數(shù)的傳感器都由敏感元件、轉(zhuǎn)換元件或控制元件組成。如振動(dòng)膜、波紋管、應(yīng)力管和應(yīng)力環(huán)、低音管和懸臂都是敏感元件，它們對(duì)壓力和力作出響應(yīng)把物理量轉(zhuǎn)變成位移。然后位移可以改變電參數(shù)，如電壓、電阻、電容或者感應(yīng)系數(shù)。機(jī)械式和電子式元件合并形成機(jī)電式傳感設(shè)備或傳感器。這樣的組合可用來(lái)輸入能量信號(hào)。熱的，光的，磁的和化學(xué)的相互結(jié)合產(chǎn)生的熱電式、

73、光電式、電磁式和電化學(xué)式傳感器。</p><p><b>　　2 傳感器靈敏度</b></p><p>　　通過(guò)校正測(cè)量系統(tǒng)獲得的被測(cè)物理量和傳感器輸出信號(hào)的關(guān)系叫做傳感器靈敏度K1，也就是K1=輸出信號(hào)增量/測(cè)量增量。實(shí)際中，傳感器的靈敏度是已知的，并且通過(guò)測(cè)量輸出信號(hào)，輸入量由下式?jīng)Q定，輸入量=輸出信號(hào)增量/K1。</p><p>　　3

74、理想傳感器的特性</p><p>　　（a）高保真性：傳感器輸出波形應(yīng)該真實(shí)可靠地再現(xiàn)被測(cè)量，并且失真很小。</p><p>　?。╞）可測(cè)量最小的干擾，任何時(shí)候傳感器的出現(xiàn)不能改變被測(cè)量。</p><p>　?。╟）尺寸：傳感器必須能正確地放在所需的地方。</p><p>　?。╠）被測(cè)量和傳感器信號(hào)之間應(yīng)該有一個(gè)線(xiàn)性關(guān)系。</p&g

75、t;<p>　?。╡）傳感器對(duì)外部影響的靈敏度應(yīng)該小，例如壓力傳感器經(jīng)常受到外部振動(dòng)和溫度的影響。</p><p>　?。╢）傳感器的固有頻率應(yīng)該避開(kāi)被測(cè)量的頻率和諧波。</p><p>　　傳感器可分為以下幾類(lèi)：</p><p><b>　　1 電傳感器</b></p><p>　　電傳感器具有許多理想特

76、性。它們不僅實(shí)現(xiàn)遠(yuǎn)程測(cè)量和顯示，還能提供高靈敏度。電傳感器可分為兩大類(lèi)。</p><p>　　（a）變參數(shù)型，包括：</p><p><b>　?。╥）電阻式；</b></p><p><b>　?。╥i)電容式；</b></p><p>　　（iii)自感應(yīng)式；</p><p

77、><b>　　（v)互感應(yīng)式；</b></p><p>　　這些傳感器的工作依靠外部電壓。</p><p>　　（b）自激型，包括：</p><p><b>　?。╥）電磁式；</b></p><p><b>　　（ii）熱電式；</b></p><p

78、><b>　?。╥ii）光柵式；</b></p><p><b>　?。╥v）壓電式。</b></p><p>　　這些傳感器根據(jù)測(cè)量輸入值產(chǎn)生輸出電壓，而且這一過(guò)程是可逆的。比如，在一般情況下，壓電式傳感器可根據(jù)晶體材料的變形產(chǎn)生一個(gè)輸出電壓；但是，如果在材料上施加一個(gè)可變電壓，傳感器可以通過(guò)變形或與變電壓同頻率的振動(dòng)來(lái)體現(xiàn)可逆效應(yīng)。&l

79、t;/p><p><b>　　2 電阻式傳感器</b></p><p>　　電阻式傳感器可以分為兩大類(lèi)：</p><p>　?。╥)那些表現(xiàn)為大電阻變化的物理量可通過(guò)分壓方式進(jìn)行測(cè)量，電位器就屬于此類(lèi)。</p><p>　?。╥i）那些表現(xiàn)為小電阻變化的物理量可通過(guò)橋電路方式進(jìn)行測(cè)量，這一類(lèi)包括應(yīng)變儀和電阻溫度計(jì)。</

80、p><p><b>　　3 電容式傳感器</b></p><p>　　電容量隨著相對(duì)介電常數(shù)、截面面積、或者極板間的距離的變化而變化。電容的特征曲線(xiàn)表明，在空間的一段范圍內(nèi)，截面面積和相對(duì)介電常數(shù)的變化與電容量變化成線(xiàn)性關(guān)系。不象電位器，變極距型電容傳感器有無(wú)限的分辨率，這最適合測(cè)量微小的位移增量的位移。</p><p><b>　　4

81、電感式傳感器</b></p><p>　　電感可以通過(guò)改變電感電路的阻抗來(lái)調(diào)節(jié)。</p><p>　　電容式和電感式傳感器的測(cè)量技術(shù)：</p><p>　?。╝）用差分式電容或電感作為交流電橋；</p><p>　?。╞）用交流電位計(jì)電路做動(dòng)態(tài)測(cè)量；</p><p>　?。╟）用直流電路為電容器提供正比于容

82、值變化的電壓；</p><p>　　（d）采用調(diào)頻法，C或者L隨著振蕩電路頻率的變化而改變。</p><p>　　電容式和電感式傳感器的一些重要特性如下：</p><p><b>　　（i)分辨率無(wú)限</b></p><p>　?。╥i）精確到滿(mǎn)量程的±0.1%</p><p>　?。╥

83、ii）位移范圍從25*10-6m到10-3m</p><p>　?。╥v）上升時(shí)間小于50us</p><p>　　典型的被測(cè)量是位移、壓力、振動(dòng)量、聲音和液位。</p><p><b>　　5 線(xiàn)性調(diào)壓器</b></p><p><b>　　6 壓電式傳感器</b></p><

84、p><b>　　7 電磁式傳感器</b></p><p><b>　　8 熱電式傳感器</b></p><p><b>　　9 光電管</b></p><p>　　10 機(jī)械式傳感器及敏感元件</p><p>　　在今天的信息時(shí)代里，信息產(chǎn)業(yè)包括信息采集、傳輸、處理三部分

85、，即傳感技術(shù)、通信技術(shù)、計(jì)算機(jī)技術(shù)?，F(xiàn)代的計(jì)算機(jī)技術(shù)和通信技術(shù)由于超大規(guī)模集成電路的飛速發(fā)展，而已經(jīng)充分發(fā)達(dá)后，不僅對(duì)傳感器的精度、可靠性、響應(yīng)速度、獲取的信息量要求越來(lái)越高，還要求其成本低廉且使用方便。顯然傳統(tǒng)傳感器因功能、特性、體積、成本等已難以滿(mǎn)足而逐漸被淘汰。世界許多發(fā)達(dá)國(guó)家都在加快對(duì)傳感器新技術(shù)的研究與開(kāi)發(fā)，并且都已取得極大的突破。如今傳感器新技術(shù)的發(fā)展，主要有以下幾個(gè)方面：</p><p>　　利用物

86、理現(xiàn)象、化學(xué)反應(yīng)、生物效應(yīng)作為傳感器原理，所以研究發(fā)現(xiàn)新現(xiàn)象與新效應(yīng)是傳感器技術(shù)發(fā)展的重要工作，是研究開(kāi)發(fā)新型傳感器的基礎(chǔ)。日本夏普公司利用超導(dǎo)技術(shù)研制成功高溫超導(dǎo)磁性傳感器，是傳感器技術(shù)的重大突破，其靈敏度高，僅次于超導(dǎo)量子干涉器件。它的制造工藝遠(yuǎn)比超導(dǎo)量子干涉器件簡(jiǎn)單。可用于磁成像技術(shù)，有廣泛推廣價(jià)值。</p><p>　　利用抗體和抗原在電極表面上相遇復(fù)合時(shí)，會(huì)引起電極電位的變化，利用這一現(xiàn)象可制出免疫傳感

87、器。用這種抗體制成的免疫傳感器可對(duì)某生物體內(nèi)是否有這種抗原作檢查。如用肝炎病毒抗體可檢查某人是否患有肝炎，起到快速、準(zhǔn)確作用。美國(guó)加州大學(xué)巳研制出這類(lèi)傳感器。</p><p>　　傳感器材料是傳感器技術(shù)的重要基礎(chǔ)，由于材料科學(xué)進(jìn)步，人們可制造出各種新型傳感器。例如用高分子聚合物薄膜制成溫度傳感器；光導(dǎo)纖維能制成壓力、流量、溫度、位移等多種傳感器；用陶瓷制成壓力傳感器。高分子聚合物能隨周?chē)h(huán)境的相對(duì)濕度大小成比例地

88、吸附和釋放水分子。高分子電介常數(shù)小，水分子能提高聚合物的介電常數(shù)。將高分子電介質(zhì)做成電容器，測(cè)定電容容量的變化，即可得出相對(duì)濕度。利用這個(gè)原理制成等離子聚合法聚苯乙烯薄膜溫度傳感器，其有以下特點(diǎn)：測(cè)濕范圍寬；溫度范圍寬，可達(dá)-400℃～+1500℃；響應(yīng)速度快，小于1S；尺寸小，可用于小空間測(cè)試；溫度系數(shù)小。</p><p>　　陶瓷電容式壓力傳感器是一種無(wú)中介液的干式壓力傳感器。采用先進(jìn)的陶瓷技術(shù)和厚膜電子技術(shù)

89、，其技術(shù)性能穩(wěn)定，年漂移量小于0.1%F.S,溫漂小于±0.15%/10K,抗過(guò)載強(qiáng),可達(dá)量程的數(shù)百倍。測(cè)量范圍可從0到60Mpa。德國(guó)E+H公司和美國(guó)Kahlo公司產(chǎn)品處于領(lǐng)先地位。</p><p>　　光導(dǎo)纖維的應(yīng)用是傳感材料的重大突破，其最早用于光通信技術(shù)。在光通信利用中發(fā)現(xiàn)當(dāng)溫度、壓力、電場(chǎng)、磁場(chǎng)等環(huán)境條件變化時(shí)，引起光纖傳輸?shù)墓獠◤?qiáng)度、相位、頻率、偏振態(tài)等變化，測(cè)量光波量的變化，就可知道導(dǎo)致這

90、些光波量變化的溫度、壓力、電場(chǎng)、磁場(chǎng)等物理量的大小，利用這些原理可研制出光導(dǎo)纖維傳感器。光纖傳感器與傳統(tǒng)傳感器相比有許多特點(diǎn)：靈敏度高，結(jié)構(gòu)簡(jiǎn)單、體積小、耐腐蝕、電絕緣性好、光路可彎曲、便于實(shí)現(xiàn)遙測(cè)等。光纖傳感器日本處于先進(jìn)水平。如IdecIzumi公司和Suns公司。光纖傳感受器與集成光路技術(shù)相結(jié)合，加速光纖傳感器技術(shù)的發(fā)展。將集成光路器件代替原有光學(xué)元件和無(wú)源光器件，使光纖傳感器有高的帶寬、低的信號(hào)處理電壓，可靠性高，成本低。<

91、;/p><p>　　半導(dǎo)體技術(shù)中的加工方法有氧化、光刻、擴(kuò)散、沉積、平面電子工藝，各向?qū)愿g及蒸鍍，濺射薄膜等，這些都已引進(jìn)到傳感器制造。因而產(chǎn)生了各種新型傳感器，如利用半導(dǎo)體技術(shù)制造出硅微傳感器，利用薄膜工藝制造出快速響應(yīng)的氣敏、濕敏傳感器，利用濺射薄膜工藝制壓力傳感器等。</p><p>　　日本橫河公司利用各向?qū)愿g技術(shù)進(jìn)行高精度三維加工，制成全硅諧振式壓力傳感器。核心部分由感壓硅膜

92、片和硅膜片上面制作的兩個(gè)諧振梁結(jié)成，兩個(gè)諧振梁的頻差對(duì)應(yīng)不同的壓力，用頻率差的方法測(cè)壓力，可消除環(huán)境溫度等因素帶來(lái)的誤差。當(dāng)環(huán)境溫度變化時(shí)，兩個(gè)諧振梁頻率和幅度變化相同，將兩個(gè)頻率差后，其相同變化量就能夠相互抵消。其測(cè)量最高精度可達(dá)0.01%FS。</p><p>　　美國(guó)Silicon Microstructure Inc(SMI)公司開(kāi)發(fā)一系列低價(jià)位,線(xiàn)性度在0.1%到0.65%范圍內(nèi)的硅微壓力傳感器,最低滿(mǎn)

93、量程為0.15psi(1KPa),其以硅為材料制成,具有獨(dú)特的三維結(jié)構(gòu),輕細(xì)微機(jī)械加工,和多次蝕刻制成惠斯登電橋于硅膜片上,當(dāng)硅片上方受力時(shí),其產(chǎn)生變形,電阻產(chǎn)生壓阻效應(yīng)而失去電橋平衡,輸出與壓力成比例的電信號(hào)。象這樣的硅微傳感器是當(dāng)今傳感器發(fā)展的前沿技術(shù),其基本特點(diǎn)是敏感元件體積為微米量級(jí),是傳統(tǒng)傳感器的幾十、幾百分之一。在工業(yè)控制、航空航天領(lǐng)域、生物醫(yī)學(xué)等方面有重要的作用，如飛機(jī)上利用可減輕飛機(jī)重量，減少能源。另一特點(diǎn)是能敏感微小被

94、測(cè)量，可制成血壓壓力傳感器。</p><p>　　中國(guó)航空總公司北京測(cè)控技術(shù)研究所，研制的CYJ系列濺謝膜壓力傳感器是采用離子濺射工藝加工成金屬應(yīng)變計(jì)，它克服了非金屬式應(yīng)變計(jì)易受溫度影響的不足，具有高穩(wěn)定性，適用于各種場(chǎng)合，被測(cè)介質(zhì)范圍寬，還克服了傳統(tǒng)粘貼式帶來(lái)的精度低、遲滯大、蠕變等缺點(diǎn)，具有精度高、可靠性高、體積小的特點(diǎn)，廣泛用于航空、石油、化工、醫(yī)療等領(lǐng)域。</p><p>　　集成

95、傳感器的優(yōu)勢(shì)是傳統(tǒng)傳感器無(wú)法達(dá)到的，它不僅僅是一個(gè)簡(jiǎn)單的傳感器，其將輔助電路中的元件與傳感元件同時(shí)集成在一塊芯片上，使之具有校準(zhǔn)、補(bǔ)償、自診斷和網(wǎng)絡(luò)通信的功能，它可降低成本、增加產(chǎn)量，美國(guó)LUCAS、NOVASENSOR公司開(kāi)發(fā)的這種血壓傳感器，每星期能生產(chǎn)1萬(wàn)只。</p><p>　　智能化傳感器是一種帶微處理器的傳感器，是微型計(jì)算機(jī)和傳感器相結(jié)合的成果，它兼有檢測(cè)、判斷和信息處理功能，與傳統(tǒng)傳感器相比有很多特

96、點(diǎn)：</p><p>　　具有判斷和信息處理功能，能對(duì)測(cè)量值進(jìn)行修正、誤差補(bǔ)償，因而提高測(cè)量精度；</p><p>　　可實(shí)現(xiàn)多傳感器多參數(shù)測(cè)量；</p><p>　　有自診斷和自校準(zhǔn)功能，提高可靠性；</p><p>　　測(cè)量數(shù)據(jù)可存取，使用方便；</p><p>　　有數(shù)據(jù)通信接口，能與微型計(jì)算機(jī)直接通信。<

97、/p><p>　　把傳感器、信號(hào)調(diào)節(jié)電路、單片機(jī)集成在一芯片上形成超大規(guī)模集成化的高級(jí)智能傳感器。美國(guó)HONYWELL公司ST-3000型智能傳感器，芯片尺寸才有3×4×2mm3，采用半導(dǎo)體工藝，在同一芯片上制成CPU、EPROM、靜壓、壓差、溫度等三種敏感元件。</p><p>　　智能化傳感器的研究與開(kāi)發(fā)，美國(guó)處于領(lǐng)先地位。美國(guó)宇航局在開(kāi)發(fā)宇宙飛船時(shí)稱(chēng)這種傳感器為靈巧傳

98、感器（Smart Sensor），在宇宙飛船上這種傳感器是非常重要的。我國(guó)在這方面的研究與開(kāi)發(fā)還很落后，主要是因?yàn)槲覈?guó)半導(dǎo)體集成電路工藝水平有限。</p><p>　　傳感器的發(fā)展日新月異，特別是80年代人類(lèi)由高度工業(yè)化進(jìn)入信息時(shí)代以來(lái)，傳感器技術(shù)向更新、更高的技術(shù)發(fā)展。美國(guó)、日本等發(fā)達(dá)國(guó)家的傳感器技術(shù)發(fā)展最快，我國(guó)由于基礎(chǔ)薄弱，傳感器技術(shù)與這些發(fā)達(dá)國(guó)家相比有較大的差距。因此，我們應(yīng)該加大對(duì)傳感器技術(shù)研