平面線圈感應(yīng)耦合等離子體中射頻電場(chǎng)穿透及功率沉積的理論研究.pdf

1、大連理工大學(xué)碩士學(xué)位論文平面線圈感應(yīng)耦合等離子體中射頻電場(chǎng)穿透及功率沉積的理論研究姓名：錢(qián)丹娜申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：等離子體物理指導(dǎo)教師：王友年20060601蘭耍垡鬯壁查塑魚(yú)墅墮王笪!!!塑皇塑塑墨墊堊嬰墮堡塑壅ResearchonElectricFieldPenetratiOnandPowerAbsorptioninPlanarTypeInductiVelyCoupledPlasmaDischargeAbstractTheindu

2、ctivelycoupledplasmashaVebeenwidelyusedjndiff色rentmatefialprocesses，suchastheplasmaetchjngandfilmdeposition，since血eh垃h—densityhomogeneousplasmacanbeobtainedunder10w—pressuredischargesFormeplanar—coilinductivelVcoupledp】a

3、smas(TcP)，thisp印erstudiesthecharacte“sticsoftheradio—frequency(rf)electric丘eldandpowerabsorptionintheplasmaFirstly，as鯽metheTadiusRofthedischaTgechamberismuchla曙eTthanitsheightL，wethencaIluseonedimensionalslabmodeltosIudv

4、the口enetrationbehavioroftherfelectricfieldintheplasmaUsingthelinearBoltzmannequatjonandMaxwellequatjons，andassumingthattheelectronenergydjstribufionfunction(PDFF)obeystheBoItzmanndistribution，wepresentgeneralexpressionso

5、ftherfelectricfieldandpowerabsoIption，discusstheiIlfluenceofthedischargepressureandelectrontemperatureonthesetwoquantiljes，andfindtheanomalousskind印thisabout2cmNext，weusefurmerthethetwodimensjonalmodeltoconsidertheradial

6、changesoftherfelectricfieldandthepowerabsorptjonEspecially，westudytheinfluenceoftheradialdistributionofthecoilpositionsontherfelectricfieldFinallywegiveasetofself_consistentequationstodescribetheinteractionsoftherfelecIr

7、icfieldwiththeplasma，namely，dete肌inelheEDFFandtherfeIectricfieldconsistentlyWichthehydrodynamicmodel，tllispaperstudiestheeffectsofthecharge_exchangec01lisjonsbet、veenionsandneutralsonthedirectcunentbiasedvoltagesheathsFo

8、Ttheplanartarget，jtisshownthatthesheaththiclmessbecomessmallasthecollisionalpar啪eterjncreasesAfittedexpressionoftheChild—LangIlluir1awfortlleplanarsheathispresentedbasedonthenumerica王resultsInaddition，theinnuenceofmetarg