鉬硅化物的場發(fā)射研究.pdf

1、分類號密級UDC注l學(xué)位論文鋁硅化物的場發(fā)射研究(題名和副題名)李新義(作者姓名)指導(dǎo)教師姓名祁康成電子科技大學(xué)副教授成都(職務(wù)、職稱、學(xué)位、單位名稱及地址)申請專業(yè)學(xué)位級別碩士專業(yè)名稱光學(xué)工程論文提交日期2008.4論文答辯日期2008.5學(xué)位授予單位和日期電子科技大學(xué)答辯委員會主席評閱人2008年月日注1:注明《國際十進分類法UDC》的類號。ABSTRACTABSTRACTVacu切rnmicro一eleetroniesdeviee

2、haslotsofadvantagessuehashigh一sPeedeleetrontransmission，lowPowereonsumPtion，highcurrentdensity，oPeratingwithoutheatingand50on.Astheeeofvacuu們nmicro一electroniesdevice，thefieldemissioneathodewillaffectthewholePed七rmaneeoft

3、hedevieedirectly.Now，thefabrieation，ProPertyaPPlieationofthefieldemissioneal五。dehavebecomeahighlightofthevacummicro一electroniesdeviee.IndertoimProvethewholePerformaneeoffieldemissionarays，manyresearcheshavebeendonetefmth

4、es加ctureandPreParationmethodsofthefieldeTnitterS.Oneofthemethods15todePositthinfilmsontheemitters，whichtakesadvantageofaseendantPhysiealandchemicalProPertiesofthethinfilmsandimProvesthefieldemissioneathodePeribrmaneeeffe

5、ctively.ThinfilmswillbefabrieatedonsilieontiPsaraytoimProvethefieldemissionPeribrmance.Theworkfunetion，eleetricandthermaleonduetanee，andchemiealreliabilityofthefilmmaterialshouldbetakeninioconsideration.Molybdenulmsilici

6、de(MosiZ)15amiddlePhaseofthebin娜comPoundmetalwiththemostamountofsilieon.IthasbecomeoneofthePeri免ctseleetionsffabrieatingthethinfilmsonthefieldemissionaraysduetoitsmetallieandceramiccharaeteristic，aswellastheexeellentPhys

7、iealandchemicProPOrties.ThecritiealcraftsoffabrieatingMosilicide面nfilmson如ifelikeedgessilicontiPsineludethefabrieationofdiodetyPebifelikeedgessilieontiPsandthedePositionMosilieidethinfilms，whiethemostimPtantPartsinthisPa

8、per.First，diodet即eknifelikeedgessilicontiPsarefabrieatedbyoxidation，PECVDcoating，lithograPhy，wetanddryetching，loealoxidationandoxidationsh呷eningsequentially.Then，Mo而nfilm15dePositedonthePr叩aredkllifel議eedgessilieontiPsby

9、usingtheelectronbeamevaPorationdePositionmethod，followedbytheanealinginvacuurnsystemtofllltheMosilieidelhinfilms.Thefieldemissioncharacteristiesofbifel議eedgessilieontiPsdiodeandsilicontiPsaraycoatedwithMosilieidethinfilm