基于AFM的納米機(jī)械刻劃切屑形成研究.pdf

1、山東大學(xué)碩士學(xué)位論文基于AFM的納米機(jī)械刻劃切屑形成研究姓名：趙菲菲申請學(xué)位級別：碩士專業(yè)：機(jī)械制造及其自動化指導(dǎo)教師：馮顯英20091020AbstractAbstractScanningprobemicroscopy(SPM)，whichisoneoftheimportanttoolsfornanotechnologyresearch，hasbeenwidelyemployedinnanotechnologyfieldwithits

2、tlighresolutionandabilityofworkinginvacuunl，atmosphericandliquidenvironmentMechanicalscratchingmachiningthatbasedontheatomicforcemicroscope(AFM)haslotsofadvantages，suchashi【ghaccuracymonitoringthesurfacewhilemachiningThe

3、refore，thefurtherresearchtonanoscratchingrelatedtechnologiesbasedonAFM，hasmuchtheorymeaningandpracticalityvalueResearchonchipformationanditsinfluencingfactorsisoneofimportantcontentsinthefieldofMechanicalmachiningresearc

4、hSo，thispaperstudiesfortheinfluencingfactorsonchipformationandmorphologicalcharacteristicsviathemechanicalscratchingmachiningofAFMFirstlytheprocessofneedlepointscratchingandAFMscratchingmechanismareanalyzed。Atthebeginnin

5、gofAFMscratchingmachining，itisaprocessofindentationWiththemovementoftheneedlepointtheaccumulationofmaterialsthatadheretoanteriorneedlepointisgraduallyincreased，thenfracturedandcarriedoffbyneedlepointThatistheformationofc

6、hipWhereaftertheexperimentresearchonscratching、析thdifferentparameters，suchasfeedrate，scratchingspeed，verticalloadandfeeddirectioniscarriedtoanalyzetheirinfluenceonchipformationanditsmorphologicalcharacteristicsFinallythe

7、minimumthicknessofcuttingisstudiedScratchingmonglinemachiningwinldifferentloadiscarriedtofindoutthecriticalloadandmachiningthicknessofchipformationThentheworkpiecesareexchangedtodocontrastiveexperimentsKeywordsatomicforc