石英晶片研磨監(jiān)控系統(tǒng)原理分析及實現(xiàn).pdf

1、中南大學碩士學位論文石英晶片研磨監(jiān)控系統(tǒng)原理分析及實現(xiàn)姓名：謝琰華申請學位級別：碩士專業(yè)：控制理論與控制工程指導教師：喻壽益20040101ABSTRACTThispaperdescribesthedesignofthemeasuresystemoffrequencyofpiezoelectricitycrystalbasedonDSP：anddiscussesdetailedlythehardwarecircuitconstructr

2、ionandsoftwaredesignThepaper6rstlyintroducesDigitalSignalProcesser(DsP)insteadoflowspeedsinglechipMicroprocesserintothekindofmea虬l(fā)resystemTheDSPchipdoesmainlysuchworksasproducingcontrollogicalsignalandcollectingextemalpu

3、lsesignaIandcalculatingresonancefrequencyofcrystalnakeWithgiVingbir【htosteadyfrequencyscansignal，thephaseLockLoop(PLL)circuitisthemostimpoprtamcircuitpartinthedesignAsafoumdation，theDSPchipandPLLtechnologyandProgramableL

4、ogicalDevice(PLD)wjl】bedescribeddetailedlyinthesecondch印tefThethirdchaptermostlyexplainsthchardwaredeViceanditsprinciple，andpresentspanialcircuitdiagramTheforthchapteranalyzesthecompartmentalizationofsoftwaremoduleandthe

5、performanceofallmodulesIntheend，thispaperpresentsmeimprovementschemebasedoncontrolAreaNet(CAN)fieldbustoestablishcommunication’hencetomeetmerequirememofmodemmanagementThispaperpresentsanewmethodtomeasurefequencyofpiezoel

6、ectrjcitycrystalinmeprocessofgrindingon1ineItcancomrolautomaticallythethicknessofcrystalItplacesthechipDSP—F240ascontrolcore，andproducesdrivingfrequencywithPhaseLockLoopThecrystalwillresonateatadriVingfrequencyandthesign

7、aJofresonatingwillbecapturedontimeBydisposingandanalyzingtheresonatingsignal，thefrequencyofcrystalwillbereadoutAnapparatusmeasuringfrequencyofcrystalon1inebasedonthemethodhasbeendesigned，andhasillustratedthatthewell—plea