利用顯微激光多普勒技術(shù)測量微懸臂梁的機械特性.pdf

1、⑧中國近代第一所大學(xué)FOUNDEDlN1895天洋大薯TlANJINUNIVERSlTY碩士學(xué)位論文●學(xué)科專業(yè)：作者姓名：指導(dǎo)教師：測試計量技術(shù)及儀器劉昀強傅星副教授天津大學(xué)研究生院2005年1月ABSTRACTMicrocantileverhasbeenwidelyappliedinmicrofieldThemechanicalcharacteristicsofmicrocantileverarehighlightedinthepro

2、cessofstudyandapplicationEspeciallyinatomicforcemicroscope(ArM)，themechanicalcharacteristicsofmicrocantileverareimportanttOimprovethequalityofimagingandtheprecisionoftestingMoreover，themarkederrorofmechanicalcharacterist

3、icsofcommercialcantileveristoobigtoacceptTherefore，measurementofmicrocantilevermechanicalcharacteristicsisakeyproblemwhichshouldbesolvedInthedissertation，acantileveroutofplanemotionmeasuringsystembasedonmicroLaserDoppler

4、technologyissetupThemethodofindirectmeasurementofmicrocantilevermechanicalcharacteristicsisanalyzed，andexperimentsaboutmicrocantileverdynamiccharacteristicsandmechanicalcharacteristicsaredoneThemajorworksinthedissertatio

5、narefollowing：1ThemeasurementprincipleofmicroLaserDopplertechnologyiscarefullyanalyzedAcantileverout—ofplanemotionmeasuringsystemissetup，thedesignofhardware，softwareandmechanismareaccomplishedandexperimentsofmicrocantile

6、veraredoneusingthissystem2TherelationshipofresonancefrequencyandYoung’SmoduleisstudiedWiththesystem，experimentsofYoung’Smoduleofrectanglecantileverandtrianglecantileveraredone，andthespringconstantofthetwocantileversareca

7、lculatedThroughtheexperiments，itisprovedthatthisisaquickandefficientwaytotestmechanicalcharacteristicsofmicrocantilever3Systemsoftwarebasedonvirtlla】instrumentationtechniqueisdesigned，includingdrivingoutput，dataacquirean

8、ddataprocess，F(xiàn)astFourierTransformation(FFT)，andfrequency—scanningUsingthissoftware，theresonance丘equencyatvarypositiononcantileveristestedandaconsistentresultofresonance療equencyisachieved4Severalexperimentsofcantilevermec

9、hanicalcharacteristicsaredonetheresuhiscomparedwiththedatacalibratedandtheerrorisanalyzedAnimprovingmethodiSsupposedforthetestofmicrocantilevermechanicalcharacteristicsKeywords：microcantilever，mechanicalcharacteristics，Y