基于MEMS熱電堆的表面高溫測試技術(shù)研究.pdf

1、中北大學(xué)碩士學(xué)位論文基于MEMS熱電堆的表面高溫測試技術(shù)研究姓名：鄒令敏申請學(xué)位級別：碩士專業(yè)：測試計量技術(shù)及儀器指導(dǎo)教師：郝曉劍20090428TheSurfaceHighTemperatureMeasurementTechnologyBasedonMEMSthermopileSensorAbstractAuthor：ZouLingminTutor：HaoXiaoJianTransienttemperatureCanhardlybem

2、easuredusingthetraditionalthermocoupleasitistoohighortheactingtimeistooshortBasedonthemicroelectronicstechnologyandthesemiconductortechnologyMEMSthermopilesensorwhichisanon—contacttemperaturemeasuringdevice，usingtheinfra

3、redradiationasitsmechanism，isnotneededtocontactthemeasuredobjectsandcaneffectivelyeliminatetheerrorsoftemperaturefieldcausedbytheinstallationofthesensortoachievenoncontacttemperaturemeasurement；atthesametime，asthemicrote

4、mperaturefluctuationoftheobjectcancauseagreatchangeinradiationenergythesensitivityoftheinfraredradiationthermometersishigllTherefore，theresearchoftransientsurfacehightemperaturemeasurementisavailableusingMEMSthermopilese

5、nsorBasedontheinfraredradiationtemperaturemeasurement，thispaperspreadsoutexpositionaroundthesystemofsurfacehightemperaturemeasurementusingMEMSthermopilesensorandexploresitintheaspectsofnleoreticaldesignandkeypartperforma

6、nceanalysisThispaperfirstlyanalyzesthecurrentresearchstatusoftransienttemperaturetestandintroducesthestructure，nowadaydevelopmentandapplicationofthethermopilesensorThen，aimingatthetemperaturemeasuringactualityanewmethodo

7、fhightemperaturemeasurementisproposedusingMEMSthermopilesensorandthesystemoftransient(msscale)surfacehightemperature(1500“C一3000。C)measurementbasedonMEMSthermopileisdesigned，thefunctionofvariouspartsofthesystemandthesele

8、ctionofthematerialarediscussedfurther；atonetime，thestaticanddynamiccalibrationmethodofthesystemaresuggestedandprovideatheoreticalbasistofurthertheinvestigationInaddition，researchingontheinfraredabsorptioncoefficientofkey