可見與紅外雙波段增透膜的研究與制備.pdf

1、分類號：!叢212UDC：密級“——編號：——可見與紅外雙波段增透膜的研究與制備STUDYANDFABRICATIONOFVISIBLEANDIRDUALBANDARCOATING學位授予單位及代碼：筮壹堡王盔堂(!Q!豎≥學科專業(yè)名稱及代碼：盤堂王捏(Q8鰻QQ2研究方向；塑垡造堂堇盔囂王猩鏖旦申請學位級別：亟指導教師：位委些麴援研究生：蟹芷羞論文起止時間：—200711—200812AbstractInordertomeetthem

2、ilitaryinstruments’operatingrequirementswedepositARcoatingonthesubstrateofZnSat400～1000rim(visibleandnearinfraredband)and7～11run(farinfraredband)，itrequiresaaveragetransmittanceover90％Weadoptelectronicbeamingvacuumdeposi

3、tingmethodwiththeaidofionassistantdepositionsystemsaswellaschoseZnSasthematerialofhighrefractiveindexandYbF3asthematerialoflowrefractiveindexUsingthreemodularprocessingsystemsofthelatestOptiLayersoftwareasassistance，opti

4、mizingtechnicalparameters，andimprovingmonitormethod，reducingthicknesserror，wehavedepositedARcoatingonthesubstrateofZnStoachievetherequirementsTheaveragetransmittanceexceeds91％through400nm一1000nmwavelengthMoreoveritmakest

5、hetransmittanceover90％through7～lllxmwavelengthInaddition，ThefilmCanresistharshenvironmentandcompletelymeetthedemandsofmilitaryopticalinstrumentsKeywords：opticalthinfilmdualbandARcoatingvacuulXlcoatingionassistantdepositi