非接觸硅片夾持裝置的研究.pdf

1、浙江大學(xué)機(jī)械工程學(xué)系碩士學(xué)位論文非接觸硅片夾持裝置的研究姓名：郭麗媛申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：阮曉東鄒俊20100101AbstractSemiconductormanufacturingtechnologyisthecoreofelectronicandinformationindustry，andoneofthemostimportanthigh—techthatpromotesthedevelopmentofn

2、ationaleconomyandsocietyinformatization，whilethegrippingandtranspotationdeviceofsilicon、ⅣaferisanimportantpartofsemiconductormanufacturingprocessNowgrippingdeviceiscontactvacuumsuctioncup，anditiseasytoproducesurfaceconta

3、mination，scratches，distortionandotherdefectsduetodirectcontactwithwafersurface，andwillcauserejectrateincreases，lowproductivityandotherissuesinnanochipsmanufacturingThetrendofsiliconwaferislargediameterwhichhassethigherde

4、mandsandchallengeswithsemiconductormanufacturingtechnology。Inrecentyears，researchersofseveralcountriesattachgreatimportancetotheresearchofnoncontactwaferholdertechnologyNon—contact、Vaf宅rholderwhichmakesuseofaerod)7namics

5、theoryhasadvantagesoflowlimittowafermaterialandshapeandhasnopollutiontoworkingenvironment，SOvariousresearchinstitutionshaveconsidereditasthethemostpromisingwayforwaf毫rholderInthispaperduetospecialrequirementsofgrippingco

6、urseofwaferholderthefollowingmajortaskswerefinished：1Analyzetheprincipleofvortex—typenoncontactholdingdevicefromtheviewofaerodynamics，andfinishsimulationstudyusingSolidworkstoestablishflow—fieldmodelandCFDsimulationsoftw

7、aretofinishnumericalcalculation2Designsuctioncupstructureinbasisoftheoreticalanalysisandflow—fieldsimulationresults。Usehighprecisionelectronicbalancetomeasureactingforce，andmakeitclearoftherelationshipbetweenactingforcea

8、ndstructureparametersandworkconditionsofthesuctioncup3Inordertoweakenthewaferrotationandincreasetheactingforceanimprovedstructurecombinedwithdiffiuence—holeandstabilitynetwasproposedThroughthesimulationandexperiment，wege