晶體硅微粉的氧化性質(zhì)研究.pdf

1、分類號:UDC:密級:學(xué)號:405705306031南昌大學(xué)碩士研究生學(xué)位論文晶體硅微粉的氧化性質(zhì)研究AStudyoftheOxidationBehaviorofCrystallineSiliconPowders鐘根香培養(yǎng)單位(院、系):指導(dǎo)教師姓名、職稱:中請學(xué)位的學(xué)科門類:學(xué)科專業(yè)名稱:論文答辯日期:材料科學(xué)與工程學(xué)院周浪教授工學(xué)材料學(xué)2008年12月20日答辯委員會主席:評閱人:翻缸2008年12月20日AbstractABSTR

2、ACTCrystallinesilieondustswidelyexistintheProeessofhighPuritysilieonProduetionandwaferProduetion，ineludingtheProcessofeuttingandgrinding.Also，themetallurgiealPurifieationteehnologiesforsolargradesilieonareoftenbasedonthe

3、silieonPowdersbygrindingfromthemetallurgiealgradesilieon.50it’5veryimPortanttosttldytheoxidationbehaviorofsilieonPowders.esPeeiallyfortheuseandstorageofthesilieonPowde稱thereeoveryofsawingandgrindingkerfsandthedeveloPment

4、ofmetallurgiealPurifieationteehnologies.InthePresentwork，theoxidationbehaviorsoferystallinesilieonPowdersinair，ultraPurewater，PEqadmixtureofwaterandPEqaeidiesolution，havebeenstudiedbymeansofTGA，XRDandEDX.Theresultsshowth

5、atnoobservableoxidationhaPPenedinthedryairat200oC，whileinwaterforsometimeabove80aCamorphous5102fmedonthesilieonPowderandtheoxidation15stronglyinflueneedbythetemPeratureandtimestayinthewater.Also，alotof51atomsdissolvedinw

6、aterwhenoxidation，whiehresultinredueeofsilieonmass.ComParedwithwaterandaqueoussolution，PEGshowedbetterProteetionfromoxidationfthesilieonPowdertosomeextent.Indi欣rentaeidiesolution，theoxidationsituationofsilieonPowder15ver

7、ydifferent.DiluteHCIsolutioneaneffeetivelyinhibittheoxidationofsilieonPowders.Ontheotherhand，notableoxidationhaPPenedonthesilieonPowdersinDiluteHFsolution(l:100andZ:100)f3daysat90oC.HydroPhilicamorphous5102formedandaloto

8、f“islands”aPPearedonthesurfaceofthesilieonPowders.However，theeoneentratedHFsolution(l:5)canremovetheoxideandthe“islands，，forllledinthediluteHFsolution.Inaddition，oxidationofkerf1055PartielesfmedintwodifferentslicingProee

9、sseswasinvestigated.ThebandsawingkerfsareeomPaetedinsPheresandtheXRDresultshowthatnotableoxidationofthesawingkerfsoeeurredinbandsawingProeess.Withtheextensionofthestoragetime，theamorphousoxideinerease.Whiletheamorphousox