解耦微機(jī)械陀螺的結(jié)構(gòu)參數(shù)穩(wěn)健優(yōu)化設(shè)計(jì).pdf

1、解耦微機(jī)械陀螺的結(jié)構(gòu)參數(shù)穩(wěn)健優(yōu)化設(shè)獨(dú)創(chuàng)性聲明本人聲明所呈交的學(xué)位論文是本人在導(dǎo)師指導(dǎo)下進(jìn)行的研究工作及取得的研究成果。據(jù)我所知，除了文中特別加以標(biāo)注和致謝的地方外，論文中不包含其他人已經(jīng)發(fā)表或撰寫過(guò)的研究成果，也不包含為獲得中國(guó)工程物理研究院或其他教育機(jī)構(gòu)的學(xué)位或證書使用過(guò)的材料。與我一同工作的同志對(duì)本研究所做的任何貢獻(xiàn)均己在論文中作了明確的說(shuō)明并表示謝意。1仲學(xué)位論文作者簽名：l斛孺簽字日期：諺‘f年歲月弓日學(xué)位論文版權(quán)使用授權(quán)書本學(xué)

2、位論文作者完全了解并接受中國(guó)工程物理研究院研究生部有關(guān)保存、使用學(xué)位論文的規(guī)定，允許論文被查閱、借閱和送交國(guó)家有關(guān)部門或機(jī)構(gòu)，同時(shí)授權(quán)中國(guó)工程物理研究院研究生部可以將學(xué)位論文全部或部分內(nèi)容編入有關(guān)數(shù)據(jù)庫(kù)進(jìn)行檢索，可以影印、縮印或掃描等復(fù)制手段保存、匯編學(xué)位論文。學(xué)位論文作者簽名：閉；％導(dǎo)師簽名：J篤(毛簽7II期：加ff年I一月日簽字日期：加11年f月弓日AbstractMicrogymscopeisoneoftheimportantM

3、icroElectroMechanicalSystems(MEMS)devicesandpotentiallyCallbeusedinawiderangeofapplicationbecause“theadv鈕噸essuchaSsmallersize，lowercost，higherreliabilityandlowerpowerconsumptlonHowwer，thestmctL鵬sizes趾ldperformanceofMEMSd

4、evicealemoresensitiVetoV獅撕onsmdesi鱸par鋤etersduetofabricationerrors，comparedtothemacro‘scaledmech唧cmsYstemThus。acco吼tingforrobustnessatthedesignstageishighlynecessarytOg礎(chǔ)emo托reliableperfbHnancesThismesisreportsanoptimalro

5、bustmethodforstructuralparametersdeslgnotdecoupledmicrogyroscopeInproposedapproach，variationsindesignpar鋤eterscausedbym趾ufacturinge玎0rsaletakenaccountintothedeterministicoptimizatlonbasedonenginee血gmodel，andthentherobust

6、designmodelisformulatedusingthewo‘st。casetolerancearlalysesthroughstudyingtheeffectondeviceperformanceandstabilitylheoptimaldesigIlprocedurebasedOnthepresentedrobustmodelisdeVelopedforprac觚aIapplication，whichisemci饑t觚dac

7、cl】rate一(1)Microgyroscopebasicsisdescribed，includingCorioliseffectandmodematchingofreso徹ntmicro斟roscope，andstructuralresponsessuchaSdriveandsense—modeamplthldesandreson枷丘equenciesaleobtainedfromdynamicsinnoFlinertialsyst

8、emBasedontheaboveaIlalysis，InodecouplinganddecouplingprinciplearediscussedAndthenadoubledecoupledmicrogyroscopeisintroducedThestiffnessofUshapedsuspenmon18砒30denVeclusingenergymethods，andthekeydesignvariablesofbeamaleana

9、lyzedThedlfierencebetWeenmet、Ⅳodecoupledgyroscopearestudiedincludingdirectmotioncoupling，electrostaticnegativespringe腩ct，anddampingf2)AgeneraloptimalrobustapproachforMEMSdeviceisdiscussedConventlonaIapproachandrobustdesi

10、gnusingengineeringmodelsarecompared，anddifferentmemod8suchasstoch枷cop岫ization，minimumsensitivityanalysis，andtolerance猢JyslsareinvestigatedRobustoptimizationconsideringtolerancesofdesignvariables18pre8ented111particul礬the

11、1111certai】1tiesofdesignvariablesaledefinedinterm8ofthewo。st。casetole瑚ces，requiringnothedetailedstatisticalinformationTheobjectivefunctionofontarge‘isappropriateinpractice，androbustconstraintsareformulatedusings缸u(yù)c枷縱resp