利用飛秒激光制備微光柵微透鏡的研究.pdf

1、分類號(hào)。UDCI。密級(jí)簽開(kāi)署。哦≯產(chǎn)哮’碩士研究生學(xué)位論文利用飛秒激光制備微光柵微透鏡的研究申請(qǐng)人：學(xué)號(hào)：培養(yǎng)單位：學(xué)科專業(yè)：研究方向：指導(dǎo)教師：完成日期：周廣博2121279電子工程學(xué)院物理電子學(xué)激光超快技術(shù)吳文智副教授2015年3月28日黑龍江大學(xué)碩士學(xué)位論文AbstractWiththedevelopmentofnanotechnologymicroopticsdevicesarewidelyappliedincommunicat

2、iondatastorage，imagingandsensingMicrogratingandmicrolenarrayalehotspotinmicroopticsdeviceresearchTherefore，howtOmanufacturethemicrolensarrayandmicrogratingmoreefficientlyisbecomkigtheurgentrequkementThefemtosecondlaseris

3、akindofultra—shortpulselaserwithhighpeakpowerandsmallscopeIthasbecome0lieofthebestmicroprocessesItcanrealizenon—hotmeltprocessingAfterprocessingprocedure，itssurfaceisverysmoothTherefore，ithasbecomeoneofmethodsofprocess衲g

4、micro—gratingandmicro—lensInthisthesis，thelaserdirectwritingsystemwhichisbuiltbyfemtosecondlaserandmicro—displacementplatformisusedtoprocessmicrogratingonpolycarbonatesurfaceTherehtionshipbetweenprocessinglinewidthofpoly

5、carbonatesurfaceandlaserenergyisstudledAtthesarnetime，theinfluenceofmicroscopeobjectivewhichhasdifferentntmaericalaperturesontheprocess噸linewidthisstudiedAtwobeaminterferometryprocessingsystemwasbuiltupTheincidentlightbe

6、amissplitbyRonchigratingThroughcontrollingtheexposuretime，manysetsofgratingstructuresareprocessedonthepolycarbonatesurfaceTheinfluenceofthelaserpulseonthemorphologyofthegratklgisstudiedTheabovedkectwritingsystemisusedtoa

7、blationmicroporesonpolycarbonateandpolymethylmethacrylatesurfaceThentheablationeffectoftwomaterialsiscomparedTheinfluenceoflaserparameteronmicro—porediameterisstudiedFinally，polycarbonatematerialisselectedtomanufactureah