三維微結(jié)構(gòu)的激光熱塑成型系統(tǒng)研究.pdf

1、浙江大學(xué)光電信息工程學(xué)系碩士學(xué)位論文三維微結(jié)構(gòu)的激光熱塑成型系統(tǒng)研究姓名：溫正湖申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：光學(xué)工程指導(dǎo)教師：張冬仙章海軍20100101浙江大學(xué)碩士論文ABSTRACTThree—dimensional(3D)microstructurefabricationmethodisoneofthekeytechnologiesofMEMS(Micro—Electro—MechanicalSystem)Efficientandec

2、onomical3DmicrostructurefabricationmethodsplayanindispensableroleofthedevelopmentofMEMStechnologyAmongalargenumberof3Dmicrostructurefabricationmethods，lasermicro—fabricationtechnologyhasthecharacteristicsofnon—contact，no

3、npolluting，lownoiseandeasytoachievetheintelligentcontrol，itCallovercomesomeshortcomingsofotherprocessingtechniquesSoitismoreandmorewidelyusedinthefieldofMEMSInthisarticle，weestablishedanovel3Dmicrostructurefabricationand

4、monitoringsystembasedonthelaserinducedthermoplasticformationItislaserdirectwritingwithoutmask，canfabricate3DmicrostructuresefficientlyrapidlyandlowcostThisnewtechnicalapproachhasbroadapplicationprospectsinmicromechanics，

5、microopticstechnologymicroelectronictechnologymicroopticalelectromechanicalsystems(MEMS)，andmicro／nano—technologyandSOonInthisproject，theinnovationsandresearchachievementisasfollows：Wedevelopeda3Dmicrostructurefabricatio

6、nandmonitoringsystembasedonlaserinducedthermoplasticformationWedesignedtheopticalcircuitsubsystem，mechanical，controlandmonitoringmoduleWhilefabricating，themicroscopeprocesscallbemonitoredinrealtimeSoitcallbeeasilyforUSto

7、observethephenomenonofthermoplasticmaterialcausedbyfocusedlaserbeamThesystemhaslowcost，simpleoperation，themoduleCanbestrongsubstitution，etc，itCanrealizemicrostructurequicklyandeasilyfabricationWealsodesigneda3Dmicrostruc

8、turefabricationandCCDimagingmonitoringsoftwaresystemItincludesthecapabilitiesoffabricating3Dmierostructures，real—timefabricationmicroscopeprocessmonitoringandacquisitionoffabricatingprocessvideo，黟aphicsanddigitalimagepro

9、cessingBysettingdifferentfabricationparametersorreadingDXFfiles，itCalleasilyfabricateavarietyof3DmicrostructuresWeusedthesoftwareinthePCdirectlycontrollingthestatementoflasersandmovingpositionandspeedoftwo—dimensionalele