一種結(jié)合溫差式和風速計式的新結(jié)構(gòu)MEMS熱式流量計.pdf

1、復(fù)旦大學(xué)碩士學(xué)位論文一種結(jié)合溫差式和風速計式的新結(jié)構(gòu)MEMS熱式流量計姓名：陳則申請學(xué)位級別：碩士專業(yè)：微電子與固體電子學(xué)指導(dǎo)教師：黃宜平20090508AbstractFlowsensorwhichplaysasignificantpartinmanyindustries，isinstalledinprocessautomationcontrolunitsandequipmentsItisanimportanttoolfordevel

2、opingproduction，conservingenergyimprovingproductqualityincreasingeconomicefficiencyandenhancingmanagementlevelResearchesanddevelopmentsofMEMSflowsensorhavebeentakingplacearoundtheworldforyearsNewbreaksareachievedinsuchas

3、pectofprinciple，structureandmaterialsAnewstructureMEMSthermalflowsensorisfirstdesignedandmanufacturedbasedonfiniteelementanalysisofatemperaturedifferenceflowsensormodeltoobservesensitivityandrangeThenewstructurecombinest

4、woprinciplesoftemperaturedifferenceandanemometerThefeatureincludes：1Abasictemperaturedifferenceflowsensorwithacentralheater；2AnewslaveheateriSdesignedunderthedownstreamsensortheheatproductivityoftheslaveheateriscontrolle

5、dbytheoutputsignalofthemainheaterwhichCanalsobeusedtodetectflowrateasananemometerTheslaveheaterraisesthedownstreamtemperature，thereforeCanincreasethetemperaturedifferencebetweenupanddownstreamanditssensitivityandrangeAge

6、ometricoptimizationisperformedtohelptodesignthechip’SlayoutincludingthewidthofheaterandSOonThechipismanufacturedbysiliconbasedmicromachiningtechnologyThesupportlayersarethermaloxideandLPCVDSi3N4layersTheheaterandsensorre

7、sistorsaremadebyTi／PtsputteringAthermalisolationsiliconnitridelayerisdepositedusingPECVDThebridgestructureisfinallyreleasedinKOHtThefinalchipis31mm28mmindimensionThecontrolcircuitoftheheaterisdesignedwimthehelpofMatlab／S

8、imulinkmodelingAccordingtotheresultsoftheRCconstant，bridgealms’ratioandTCRmismatchingsimulations，acircuitdesignapproachisbroughtaboutThemanufacturedchipistestedintheflowrangefrom0to1L／rainBycomparingdifferentworkingmodes