基于金屬導(dǎo)電內(nèi)芯的微流控光學(xué)變焦透鏡陣列的研制.pdf

1、南京郵電大學(xué)碩士學(xué)位論文基于金屬導(dǎo)電內(nèi)芯的微流控光學(xué)變焦透鏡陣列的研制姓名：楊鵬申請學(xué)位級別：碩士專業(yè)：光學(xué)工程指導(dǎo)教師：梁忠誠20090401南京郵電人學(xué)碩一lj研究生學(xué)位論文AbstractAbstractWiththedevelopmentofmodemoptics，theresearchersoftheworldinthisfieldareattachingmoreandmoreimportancetotheinvestigat

2、ionandapplicationsofmicro—opticselementsinmanyfieldsThemicrolensarrayisallimportantkindofmicro—opticselement，whichhasabroaduseinopticalcommunicationandopticalinformationprocess，etcThisdissertationplacesemphasisuponthedes

3、igntheoryandthefabricationtechnologyofmicro—lensarrayAnovelprogramofoptofluidiczoomlensarrayisputforwardwhichisbasedonthemetalconductiveinnerCOreThislensarrayhasmanyadvantagesoverthefixed—focusones，suchaslargezoomrange，r

4、apidrespondingandsmalldistortion，etcThemaincontentsofthispaperarepresentedasfollows：(1)Achipstructureofvoltage—controlledzoomlensarraybasedonelectrowettiv：dielectric(EWOD)hasbeenproposedTheinnercoreofthischipisbetweenthe

5、upperlayerandthelowerlayer，whichformsasandwichstructure、Ⅳithmicrochannelnetworks(2)ThepropertiesandfilmplatingofdielectricmaterialshavebeenintroducedThroughexperimentsofEWODeffectonconductiveinnercore，theinfluenceofdiffe

6、rentthicknessofdielectricmaterialshasbeenresearched(3)Theoptofluidiezoomlensarraybasedonmetalinnercorehasbeenfabricated，andtheworkofthisresearchmainlyincludes：choosingmaterials，designingandmanufacturingtheinnercore，deali

7、ngwiththesurface，integratingthechip，fillingwithliquidaswellasproducingelectrodes，etc(4)Someprimaryparametersofthemicrolensarrayhavebeenanalyzedandtheexperimentalresultsmatchwell、^ritllthesimulatedconclusionsKeywords：opto