相位調(diào)制型激光自混合干涉測量微納米技術(shù)的研究.pdf

1、南京師范大學(xué)博士學(xué)位論文相位調(diào)制型激光自混合干涉測量微納米技術(shù)的研究姓名：郭冬梅申請(qǐng)學(xué)位級(jí)別：博士專業(yè)：物理電子學(xué)指導(dǎo)教師：王鳴20070510AbstractWhenaportionoflightemittedfromalasersourceisreflectedorscatteredbackintothelasercavitybyanexternaltarget，thereflectedlightwillmixwiththeligh

2、tinsidethecavitycausingamodulationofthelaseroutputpower111isphenomenonis‘calledasselfmixinginterference(SMI)，inwhichthereflectedlightcarriessomeinformationoftheexternaltargetTheselfmixinginterferencecomesfromtheopticalfe

3、edbackeffect，PeoplealwaystriedtoeliminatetheopticatfeedbackeffectpreviouslyGraduallypeoplebegantomakeuseofitactively10measuresomephysicalquantifies，thusselfmixinginterferencetechnologywasbroughtforthInordertOimprovethedi

4、splacementmeasurementaccuracyoftheselfmixinginterference，highaccuracyphasemeasurementmethodisintroducedintotheSMIsystemTwomethodshavebeenreported：injectioncurrentmodulationandexternalcavitylengthmodulationConsideringtheu

5、navoidablemeasurementerrorcausedbythedisadvantagesofthetwomethods，anewexternalcavitymodulationmethod：phasemodulationtechniqueisproposedinOurpapertoimprovethemeasurementaccuracyoftheSMIsystemAnelectro—opticmodulatorinthee

6、xternalcavityisusedtomodulatethephaseofthelaserbeamwimhi曲modulmionaccuracyandfrequencyBasedonthephasemodulation，someanalysismethodoftheSMIsignalisproposed：linearphasemodulationandtemporalcarrierphaseshiftingtechnique，sin

7、usoidalphasemodulationandfourbucketintegrationtechnique，sinasoidalphasemodulationandFFTanalysismethodTheoreticalanalysisispresentedrespectivelyErrorsourcesduringthemeasurementanditsinfluenceonthemeasurementaccuracyissimu

8、latedExperimentallyHeNelaserandlaserdiodeSMIsystem、^，itIlphasemodulationhavebeensetuptoreconstructmicro—displacementoftheexternaltargetandameasurementaccuracyofafewnanometersCallbeobtainedStudyresultsshowthatthesinusoida

9、lphasemodulationandFFTanalysismethodismoreimmunetovariousnoisesandthemeasurementrangeismorelargerInaddition，anewabsolutedistancemeasurementmethodbasedondoublemodulationtechniqueusingSMIsystemisproposedWavelengthmodulatio