基于面向?qū)ο蠓椒ǖ陌雽?dǎo)體生產(chǎn)線仿真.pdf

1、同濟(jì)大學(xué)碩士學(xué)位論文基于面向?qū)ο蠓椒ǖ陌雽?dǎo)體生產(chǎn)線仿真姓名：蔣新華申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：控制科學(xué)與工程指導(dǎo)教師：吳啟迪王中杰20050301壘墮!型一一——ABSTRACTThedevelopmentofmicroclectronicindustryhasafar—reaclfingimpactORsocialeconomicsandpeople’SdailylifeWiththeincreasingdemandofApplicati

2、onSpecificIntegratedCircuits，thecompetitionofmicroelectronicindustryisgettingmoreandmoreintense，whichmakestheproblemofsemiconductormanufacturingschedulingmoreandmoreimportantTheprofitofthetwosemiconductormanufacturerswit

3、hsimilarscaleandequipmentsdependslargelyontheschedulingpoliciestheyemployedInordertosolvethisproblem，greateffortshavebeenendeavoredintheorybutlittleresultisobtmnedDuetothesemiconductormanufacturingline(SML)beingreentrant

4、withcomplexprocessesandseriousrandomness，theschedulingtheorySOfarisnotsufficienttosolvetheschedulingproblemComputertechnologyandsimulationtechnologyprogressesrapidlywhichprovideapowerfulmeansforinvestigatingthescheduling

5、ofSMLbycomputersimulationTheschedulingsoftwareonmarketkeepssecretintechnologybafflingsecondarydevelopmentandisveryexpensiveBasedonthoroughunderstandingoftheproductionprocessandcharacteristicsofSML，traditionalreleasepolic

6、iesandschedulingrulesarecomprehensivelyinvestigatedBydeepresearchinobject—orientedtechnologyanddiscreteeventsimulation，asimulationsystemofSMLisdevelopedThesimulationsystembegantotakeshapeandhadmorethan50classesThesimulat

7、ionsystemisverifiedbya12一workstation40一machinelinemanufacturinga60一stepproduct，whichprovesthesystemisflexibleandeasilyextendedFinallyareal—timeschedulingframeworkofsemiconductormanufacturingJinejSproposed。KeyWords：Semico