化學機械拋光機理及磁頭-磁盤系統(tǒng)靜態(tài)特性的研究.pdf

1、山東建筑大學碩士學位論文化學機械拋光機理及磁頭磁盤系統(tǒng)靜態(tài)特性的研究姓名：于慧申請學位級別：碩士專業(yè)：機械設計及理論指導教師：史寶軍201205山東建筑大學碩士學位論文Reasea托honChemicalMechanicalPolishingMechanism髓dStaticCh2uract嘶sticsofhead／disksystemYuHui(MechanicalEn百ne鰣n曲DirectedbyShiBaojunABSTRACT

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7、face鋤dt11eabrasiveconcell協(xié)ationonCMPmaterialr鋤ovalrateAsmedist柚cebe晰eellmeheadslidcr鋤dtllediSkConti加esrcducing，nleimpactoftlleharddisksumceroughIlessalsobecom豁incre鼬in百ysignificant111t11epresentstudy，meReyIloldsequationC

8、0nsid甜ngt11egas艘factione毹ctisusedtakingintoacco吼tsumcesurfacerougllllesswhichisasinecurvetocalculatenlestaticcharacteristicsofaslidcrwiⅡ1ultraminspaCing。Pressurcdistribution，pressureamplitudeand鋤1plitudepointofpressuredi

9、s仃ibutionarecalculatedbysolVingreynoldsequationconsid酣ngmegasralefIactione毹ctn哪矗callyusingamesh舶emethodcalledLSFDwh朗thedisksumcerougllIlessalongnles“der1engthdirection，medisksumcerouglmeSsalongmesliderwidmdirection鋤dⅡlr∞