溶膠—凝膠技術(shù)制備減反射薄膜的研究.pdf

1、浙江大學(xué)碩士學(xué)位論文溶膠—凝膠技術(shù)制備減反射薄膜的研究姓名：武曉培申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：材料物理與化學(xué)指導(dǎo)教師：樊先平20050101ABSTRACTInthispaperSi02，Si02Ti02，Si02Zr02andSi02B20aantimflectioncoatingwerepreparedviasolgelprocessing，bydip—coatingonglasssubstrateThetransmittanceoft

2、heglasseswiththeantireflectioncoatingwasmeasuredbyUV廠、，ISspectrophotometerThecompositionandcatalysisconditionofthesolsanddipcoatingprocesshavebeenfoundtohavesignificantinfluence011the缸薯n鋤itta血ceoftheglasseswiththeanfiref

3、lectioncomingThetransmittanceofthegl鼬∞swiththeantireflectioncoatingthatwaspreparcdunderammoniacatalysiswashi曲暇thanthatunderhydrochloricacidcatalysisThetransmittanceoftheglasswiththeantireflectioncoatingwasfoundtobehigher

4、than95％TheantirefleetioncoatingOnthesiliconwafersubstratehasbeenpreparedbysolgelprocessandthereflectivityofthesiliconwaferwithantirefleetioncoatingWasmeasuredbyUVVISNIRspectrophotometerThecompositionandcatalysiscondition

5、ofthesolsanddip—coatingprocesshavebeenfoundtohavesignificantinfluenceonthereflectivityofthesiliconwaferwithantireflecfioncoatingThereflectivityofthesiliconwaferwithanfimflcctioncoatingthatwaspreparedunderhydrochloricacid

6、catalysisWasmuchlowerthanthatunderammoniacatalysisThereflectivityofthesiliconwaferwithantirefle圮tioncominghasbeenfoundtobelowerthan10％Thephotovoltaicpropertiesofsiliconsolarcellswithanfimflecfioncoatingpreparedbysolgelpr

7、ocesswereinvestigatedThehnpmvementobtainedinthesillconsolarcellefficiencyhasbeenfoundtobeabout20％whenantireflectioncoatingswerepreparedonsiliconsolarcellsunderhydrochloricacidcatalysisTheimprovementobtainedinthesiliconso

8、larcellefficiencywasabout15％whenantireflectioncoatingswerepreparedonsiliconsolarcellsunderammoniacatalysisKeywords：solgelprocess，antireflectioncoating，absorptionspectrareflectancespectrum，siliconwafers，solarenergycells，I