溶膠凝膠法制備氧化硅薄膜裂紋形貌研究.pdf

1、武漢理工大學(xué)碩士學(xué)位論文溶膠凝膠法制備氧化硅薄膜裂紋形貌研究姓名：陳炎兵申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：光電子及信息材料指導(dǎo)教師：孫志剛顧爾丹20081201武漢理工大學(xué)碩士學(xué)位論文ABSTRACTThetechnologyoffillingnanocraktofabricatenanowireattractsmuchattention，forit’Saneffective，cheap，simpleandcontrolledtechniqueT

2、heoreticalandexperimentalworkonthecrackpatternandcontrollingtechnologyinterestedmanypeopleAlthoughthisapproachhasmanyvirtues，theresearchinthisfieldisstilllimited，furtherworkshouldbedoneSolgelissuedtesearchthecrackingbeha

3、viorofsiliconfilminthispaperOrientedstressisintroducedbybendingthesubstrate，andthemechanismisdiscussedWavynanocrakisobservedintheexperimentbyadjustingthetreatedtemperatureandtime，agingtimeofthesol，andthefilmthicknessThew

4、avynanocrackisbetween50nmand500nmwide，longerthanhundredsofmicronIthasgreatvalueinapplicationTheorientationofthedominantstressisdifferentineachpartofthefilm，whileintroducingstressbybendingthesubstrateThestressD1dominatesi

5、ntheboundarythestraightcrackorientedalongthex2axial；Thestressor2dominatesinthecenterthestraightcrackorientedalongtheXIaxial；Theorientationoftheinthecomerisdependedonthevectorgraphofor1and0“2，thecrackcurved；Thesolmustbeag

6、edforlongerthan30days，ifthewavynanocrackisexpected，oronlystraightcanbeobservedThecriticalcrackingtemperaturereducedwiththeagingtimeThegrowthofthewavynanocrackcanbedividedintothreeperiods：nucleation，propagation，terminatio

7、nAsthestressincreasingcracktipwillnucleatewhenthestressreachesthecriticalvalueInthepropagation，thegrowingspeedofthecrackincreasedwithtime，andwillintenselypropagateafteracriticaltimeCrackwillterminateinthetermination，when

8、thecrackingenergyisallreleasedShearstressplaysanimportantroleinthegrowthofcurvedcracksincludingcircularcrack，spiralcrackandwavycrackCrackfaceslippedduringthegrowthofthecurvedcracksTheorientationoftheshearstressalongthefa

9、cepointtoaspecificallypointMOnlyonepointMcanbefoundinthecircularcrack；AseriesofpointMcanbefoundinthewavycrackandspiralcrackIfthesepointsareintwoparallellines，crackwillgrowintowavypattern；Ifthesepointsaleinthesameline，cra