LED器件及芯片分析技術(shù)的研究.pdf

1、丫771905梗旦大學(xué)碩士學(xué)位論文LED器件及芯片分析技術(shù)的研究院系(所)：材料科學(xué)系專、峨姓名：指導(dǎo)教師：完成日期：材科物理與化學(xué)樊華李越生教授2005年5月20口哮茬作者、辱師同疆勃全文公布”學(xué)校代碼學(xué)號10246022030015AnalysisTechnologyResearchofLEDDeviceandEpitaxyWaferAbstract：Semic』3nductorf秘temittingdiodes(LEDQhaveb

2、eenfookedas函enextgenerationlightingsourcesTraditionallightingsourcesaredestinedtobereplacedbyLEDsbecausetheirpotentialefficiencyandlongevityfarexceedsthatofexistinglightingtechnologiesHowevercurrentstate—ofthe—artLEDperf

3、ormanceisfarbelowthislimit，andreachingitrequiresthatseveralmajortechnicalobstaclesbeovercomeItshouldputmoreattentionintheseareas，includingthedistributionofmaterialsanalysis，deviceanalysistechnologyetcInthisthesis，Wefocus

4、on5rampackagingLEDdeviceandInGaAIPepitaxywaferAanalysisoftheLEDdevicepackagingstructureandtheepitaxystructure，component，interfacewillbeintroduceddetailedlyBythismeans，somemicroanalysistechniques，includingCSAM，SEM，XRD，TEM

5、，SIMS，etcareinvestigatedBasedonthisresearchwork，anintegratedanalysistechnologyisbroughtout，whichwillbehelpfultodevicefailureanalysis，epitaxyprocessmonitorandprocessimprovementKeywords：ightemittingdiode(LED)，LEDdeviceanal