VCSEL刻蝕工藝研究.pdf

1、長春理工大學(xué)碩士學(xué)位論文VCSEL刻蝕工藝研究姓名：左亮申請學(xué)位級別：碩士專業(yè)：凝聚態(tài)物理指導(dǎo)教師：王曉華20100301ABSTRACTVerticalCavitySurface—EmittingLasers(VCSEL)haveadvantagesofsmalldivergenceangle、shortresonatorandlowthresholdcurrentetal，Sothattheopticalinformation、op

2、ticalinterconnects、andopticalfibercouplerhasawideapplicationprospectTheintroductionofoxidesofrestrictiontechnologiestofurtherreducethedevicethresholdcurrentandimprovetheelectroopticalconversionefficiencyisthecurrentVCSEL

3、optoelectronicdevicetolimittheproductiontoachievethemaintechnicalmeansusedDuringpreoxidationprocess，UseetchingtechniquetoproduceoxidewindowtobeexposedoxidelayerDryetchingistheVCSELproductionofthemorewidelyusedtechnologyb

4、utitshighcostandtechnologicalcomplexityoffeaturesWeselectionthewetetchingtechnologyhasproducedawindowbecauseitislowcost、simpleandeasytooperate，andresearchtheproblemoftheoxidewindowFirststudiedtheetchingsolutionforheterog

5、eneousmaterials，GaAs／A1GaAsselectivecorrosioncharacteristics，isparticularlyconcernedaboutthehi曲AIoxidelayeroccurringatthecomponenttobeaseriousinternalcorrosion(call“coattail”)Thereforaccordingtoalargenumberofexperimental

6、results，comparedandanalyzedthecorrosionmorphologyandtheorderlinessunderthesameconditionsofcorrosivesolutionH2S04／H202／H20，H3P04／H202／H20andH3P04／H202Studieshaveshownthat，H2S04／H202／H20solutionselectivecorrosionofmatefial

7、sevidentinthematerialexistenceoftheheterogeneityoftheinterfacestep，highA1compositiontobeoccurringattheinneroxidelayerisalsomoreseverecorrosion，andtheetchingratefasterisnotconducivetoprecisecontrolofetchingdepthTheetching

8、solutionH3P04／I1202didnothavea”coattail”structure，butthesidewallslopeistoolarge(about450)，andtherateistooslowforprocessrequirementsaremoredemandingFocusesonthe980nm／808nmVCSELwaferwetetchingtechniquesUnderthesameconditio

9、nsweselecttheH3P04fH202／H20，BecauseitsetchingmorphologyandratesbetweenH2SO棚202／H20andH3P04／H202solutionByoptimizingtheetchingsolutionoftheratio，enhancementofheterogeneousmaterialsnon—selectivecorrosion，boththebasicelimin

10、ationofthe”coattail”structure，butalsotakeintoaccountthesteepnessofthesidewallandtheetchingprecisionforthewetetchingⅢ一VethnicheterogeneityofmaterialsprovidesameaningfulreferenceKeywords：VCSEL；Oxideconfmementstructure；Wete